Modeling and waveform optimization of a nano-motion piezo stage

IEEE/ASME Transactions on Mechatronics

Volumn 16, Issue 4, 2011, Pages 615-626

  Merry, Roel J E ^b   Maassen, Martijn G J M ^b   Van De Molengraft, Marinus J G ^a   Van De Wouw, Nathan ^a   Steinbuch, Maarten ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b TMC   (Netherlands)

Author keywords

Dynamical modeling; input optimization; non smooth dynamics; piezo actuators

Indexed keywords

ASYMMETRIC WAVEFORMS; CONSTANT VELOCITIES; CONTACT DEFORMATION; DYNAMICAL MODELING; FRICTION MODELS; HIGH-PRECISION; INPUT OPTIMIZATION; MODEL ACCURACY; MODEL BASED OPTIMIZATION; MODEL-BASED; NON-SMOOTH; NUMERICAL TIME-STEPPING; OPTIMIZATION METHOD; PIEZO ACTUATOR; PIEZO MOTORS; PIEZO STAGE; STICK-SLIP EFFECT; SWITCHING BEHAVIORS; WAVE FORMS; WAVEFORM OPTIMIZATION;

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); EXPERIMENTS; FRICTION; OPTIMIZATION; SLIP FORMING;

PIEZOELECTRIC MOTORS;

EID: 79956083612     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2010.2050209     Document Type: Article

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