Design and control of a decoupled two degree of freedom translational parallel micro-positioning stage

Review of Scientific Instruments

Volumn 83, Issue 4, 2012, Pages

  Lai, Lei Jie ^a   Gu, Guo Ying ^a   Zhu, Li Min ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL STRATEGIES; CONTROLLER DESIGNS; CROSS-COUPLINGS; DESIGN AND CONTROL; DESIGN MODELS; FEED-FORWARD CONTROLLERS; INPUT AND OUTPUTS; LINEAR MOTION; LOAD CAPACITY; MICRO POSITIONING; MONOLITHIC COMPLIANT MECHANISMS; OPEN LOOPS; OPTIMAL DESIGN; PARASITIC MOTION; PERFORMANCE TESTS; POSITIONING AND TRACKING; PROPORTIONAL INTEGRAL DERIVATIVE CONTROLLERS; STATIC AND DYNAMIC; SYMMETRIC DISTRIBUTIONS; TWO DEGREES OF FREEDOM; TWO-DEGREE OF FREEDOM; XY STAGE;

CONTROLLERS; COUPLINGS; DYNAMIC MODELS; FINITE ELEMENT METHOD; MECHANISMS; NATURAL FREQUENCIES; PIEZOELECTRIC ACTUATORS; STIFFNESS MATRIX;

JOINTS (STRUCTURAL COMPONENTS);

ARTICLE; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; INSTRUMENTATION; INTERFEROMETRY; LASER; MECHANICS; MICROTECHNOLOGY; MOTION; THEORETICAL MODEL;

EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; INTERFEROMETRY; LASERS; MECHANICAL PROCESSES; MICROTECHNOLOGY; MODELS, THEORETICAL; MOTION;

EID: 84860600386     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3700182     Document Type: Review

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