Atomic calligraphy: The direct writing of nanoscale structures using a microelectromechanical system

Nano Letters

Volumn 13, Issue 7, 2013, Pages 3379-3384

  Imboden, Matthias ^a   Han, Han ^b   Chang, Jackson ^a   Pardo, Flavio ^c   Bolle, Cristian A ^c   Lowell, Evan ^a   Bishop, David J ^a,b  

^a Boston University   (United States)

^b USA   (United States)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

fab on a chip; MEMS; nanofabrication; nanotechnology; NEMS

Indexed keywords

DIRECT WRITING; FAB ON A CHIP; HIGH SPEED CONTROL; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NANOMETER PRECISION; NANOSCALE METALS; NANOSCALE STRUCTURE; NANOSTRUCTURE FABRICATION;

ELECTROMECHANICAL DEVICES; MEMS; MICROMECHANICS; MICROMETERS; NANOSTRUCTURES; NANOTECHNOLOGY; NEMS; PLATE METAL; PLATES (STRUCTURAL COMPONENTS);

ATOMS;

NANOPARTICLE;

CHEMISTRY; DEVICE FAILURE ANALYSIS; DEVICES; EQUIPMENT DESIGN; MICROELECTROMECHANICAL SYSTEM; MOLECULAR IMPRINTING; NANOTECHNOLOGY; ULTRASTRUCTURE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MOLECULAR IMPRINTING; NANOPARTICLES; NANOTECHNOLOGY;

EID: 84880167375     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl401699w     Document Type: Article

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