A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 1464-1467

  Ji, Lujun ^a   Zhu, Yong ^a   Moheimani, S O Reza ^a   Yuce, Mehmet Rasit ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; CAPACITIVE DISPLACEMENT SENSORS; CAPACITIVE READOUT; CAPACITIVE SENSING; COMB-DRIVE ACTUATOR; DYNAMIC RANGE; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED; MICROSTAGE; NANO-POSITIONER; ON CHIPS; OPEN LOOPS; RESONANCE FREQUENCIES;

MICROELECTROMECHANICAL DEVICES; RESONANCE;

SENSORS;

EID: 79951872430     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690373     Document Type: Conference Paper

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