SCOPUS 정보 검색 플랫폼

Nanoscale

Volumn 3, Issue 7, 2011, Pages 2739-2742

100 mm dynamic stencils pattern sub-micrometre structures

(3) Savu, Veronica a Xie, Shenqi a Brugger, Juergen a

a EPFL (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

APERTURE SIZES; DEPOSITION SEQUENCES; DYNAMIC MODES; LIFE-TIMES; MICROHEATER; NOVEL SOLUTIONS; STENCIL LITHOGRAPHY; TWO-DIMENSIONAL PATTERNING; TWO-DIMENSIONAL TRAJECTORY; UNIQUE FEATURES; VARIABLE PERIOD; WAFER SCALE;

TWO DIMENSIONAL;

SILICON DERIVATIVE; SILICON NITRIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; NANOTECHNOLOGY;

MICROSCOPY, ATOMIC FORCE; NANOTECHNOLOGY; SILICON COMPOUNDS;

EID: 79960200730 PISSN: 20403364 EISSN: 20403372 Source Type: Journal
DOI: 10.1039/c1nr10083a Document Type: Article

Times cited : (8)

References (18)

1
- 0037450241
- A. R. Champagne A. J. Couture F. Kuemmeth D. C. Ralph Appl. Phys. Lett. 2003 82 1111 1113
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1111-1113
- Champagne, A.R.¹ Couture, A.J.² Kuemmeth, F.³ Ralph, D.C.⁴

2
- 78650618216
- F. D. Fleischli K. Sidler M. Schaer V. Savu J. Brugger L. Zuppiroli Org. Electron. 2011 12 336 340
- (2011) Org. Electron. , vol.12 , pp. 336-340
- Fleischli, F.D.¹ Sidler, K.² Schaer, M.³ Savu, V.⁴ Brugger, J.⁵ Zuppiroli, L.⁶

3
- 33745899020
- E. A. Speets P. Te Riele M. A. F. van den Boogaart L. M. Doeswijk B. J. Ravoo G. Rijnders J. Brugger D. N. Reinhoudt D. H. A. Blank Adv. Funct. Mater. 2006 16 1337 1342
- (2006) Adv. Funct. Mater. , vol.16 , pp. 1337-1342
- Speets, E.A.¹ Te Riele, P.² Van Den Boogaart, M.A.F.³ Doeswijk, L.M.⁴ Ravoo, B.J.⁵ Rijnders, G.⁶ Brugger, J.⁷ Reinhoudt, D.N.⁸ Blank, D.H.A.⁹

4
- 79960187907
- L. Gross R. R. Schlittler G. Meyer L. A. Fendt F. Diederich T. Glatzel S. Kawai S. Koch E. Meyer J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. 2010 28 6
- (2010) J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. , vol.28 , pp. 6
- Gross, L.¹ Schlittler, R.R.² Meyer, G.³ Fendt, L.A.⁴ Diederich, F.⁵ Glatzel, T.⁶ Kawai, S.⁷ Koch, S.⁸ Meyer, E.⁹

5
- 79954464406
- D. S. Engstrom V. Savu X. N. Zhu I. Y. Y. Bu W. I. Milne J. Brugger P. Boggild Nano Lett. 2011 11 1568 1574
- (2011) Nano Lett. , vol.11 , pp. 1568-1574
- Engstrom, D.S.¹ Savu, V.² Zhu, X.N.³ Bu, I.Y.Y.⁴ Milne, W.I.⁵ Brugger, J.⁶ Boggild, P.⁷

6
- 79951865198
- O. Vazquez-Mena K. Sidler V. Savu C. W. Park L. G. Villanueva J. Brugger IEEE Trans. Nanotechnol. 2011 352 357
- (2011) IEEE Trans. Nanotechnol. , pp. 352-357
- Vazquez-Mena, O.¹ Sidler, K.² Savu, V.³ Park, C.W.⁴ Villanueva, L.G.⁵ Brugger, J.⁶

7
- 75149175055
- S. Fostner S. A. Burke J. Topple J. M. Mativetsky J. Beerens P. Grutter Microelectron. Eng. 2010 87 652 657
- (2010) Microelectron. Eng. , vol.87 , pp. 652-657
- Fostner, S.¹ Burke, S.A.² Topple, J.³ Mativetsky, J.M.⁴ Beerens, J.⁵ Grutter, P.⁶

8
- 79960184366
- M. J. K. Klein F. Montagne N. Blondiaux O. Vazquez-Mena H. Heinzelmann R. Pugin J. Brugger V. Savu J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. 2011 29 5
- (2011) J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. , vol.29 , pp. 5
- Klein, M.J.K.¹ Montagne, F.² Blondiaux, N.³ Vazquez-Mena, O.⁴ Heinzelmann, H.⁵ Pugin, R.⁶ Brugger, J.⁷ Savu, V.⁸

9
- 77956894559
- M. D. Dickey K. J. Russell D. J. Lipomi V. Narayanamurti G. M. Whitesides Small 2010 6 2050 2057
- (2010) Small , vol.6 , pp. 2050-2057
- Dickey, M.D.¹ Russell, K.J.² Lipomi, D.J.³ Narayanamurti, V.⁴ Whitesides, G.M.⁵

10
- 68649103192
- V. Savu J. Kivioja J. Ahopelto J. Brugger IEEE Trans. Appl. Supercond. 2009 19 242 244
- (2009) IEEE Trans. Appl. Supercond. , vol.19 , pp. 242-244
- Savu, V.¹ Kivioja, J.² Ahopelto, J.³ Brugger, J.⁴

11
- 57249086389
- V. Savu M. A. F. van. de. Boogaart J. Brugger J. Arcamone M. Sansa F. Perez-Murano J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. 2008 26 2054 2058
- (2008) J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.-Process., Meas., Phenom. , vol.26 , pp. 2054-2058
- Savu, V.¹ Van De Boogaart, M.A.F.² Brugger, J.³ Arcamone, J.⁴ Sansa, M.⁵ Perez-Murano, F.⁶

12
- 79960152770
- J. L. Wasserman K. Lucas S. H. Lee A. Ashton C. T. Crowl N. Markovic Rev. Sci. Instrum. 2008 79 4
- (2008) Rev. Sci. Instrum. , vol.79 , pp. 4
- Wasserman, J.L.¹ Lucas, K.² Lee, S.H.³ Ashton, A.⁴ Crowl, C.T.⁵ Markovic, N.⁶

13
- 12944295089
- S. Egger A. Ilie Y. T. Fu J. Chongsathien D. J. Kang M. E. Welland Nano Lett. 2005 5 15 20
- (2005) Nano Lett. , vol.5 , pp. 15-20
- Egger, S.¹ Ilie, A.² Fu, Y.T.³ Chongsathien, J.⁴ Kang, D.J.⁵ Welland, M.E.⁶

14
- 79960171876
- S. Q. Xie, V. Savu and J. Brugger, IEEE Proceedings of the 16th International Conference on Solid-state Sensors, Actuators, and Microsystems, 2011
- (2011) IEEE Proceedings of the 16th International Conference on Solid-state Sensors, Actuators, and Microsystems
- Xie, S.Q.¹ Savu, V.² Brugger, J.³

15
- 79960182716
- O. Vazquez-Mena L. G. Villanueva V. Savu K. Sidler P. Langlet J. Brugger Nanotechnology 2009 20 10
- (2009) Nanotechnology , vol.20 , pp. 10
- Vazquez-Mena, O.¹ Villanueva, L.G.² Savu, V.³ Sidler, K.⁴ Langlet, P.⁵ Brugger, J.⁶

16
- 44149097640
- O. Vázquez-Mena G. Villanueva M. A. F. van den Boogaart V. Savu J. Brugger Microelectron. Eng. 2008 85 1237 1240
- (2008) Microelectron. Eng. , vol.85 , pp. 1237-1240
- Vázquez-Mena, O.¹ Villanueva, G.² Van Den Boogaart, M.A.F.³ Savu, V.⁴ Brugger, J.⁵

17
- 0037354014
- M. Kölbel R. W. Tjerkstra K. Gyuman J. Brugger C. van Rijn W. Nijdam J. Huskens D. N. Reinhoudt Adv. Funct. Mater. 2003 13 219 224
- (2003) Adv. Funct. Mater. , vol.13 , pp. 219-224
- Kölbel, M.¹ Tjerkstra, R.W.² Gyuman, K.³ Brugger, J.⁴ Van Rijn, C.⁵ Nijdam, W.⁶ Huskens, J.⁷ Reinhoudt, D.N.⁸

18
- 56549105666
- J. F. Creemer D. Briand H. W. Zandbergen W. van der Vlist C. R. de Boer N. F. de Rooij P. M. Sarro Sens. Actuators, A 2008 148 416 421
- (2008) Sens. Actuators, A , vol.148 , pp. 416-421
- Creemer, J.F.¹ Briand, D.² Zandbergen, H.W.³ Van Der Vlist, W.⁴ De Boer, C.R.⁵ De Rooij, N.F.⁶ Sarro, P.M.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.