MEMS technology for the advancement of science

Journal of Low Temperature Physics

Volumn 135, Issue 1-2, 2004, Pages 51-62

  Lopez D ^a   Pardo, F ^a   Bolle, C ^a   Decca, R S ^b   Bishop, D ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b INDIANA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMUNICATION; CONSUMER PRODUCTS; HEALTH CARE; MEASUREMENTS; MICROMACHINING; MINIATURE AUTOMOBILES; SENSORS; TECHNOLOGY; TRANSPORTATION;

MICROMACHINES;

MICROELECTROMECHANICAL DEVICES;

PHYSICS;

EID: 1842865646     PISSN: 00222291     EISSN: None     Source Type: Journal    
DOI: 10.1023/b:jolt.0000016981.94742.e0     Document Type: Article

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