Nanometer-scale scanning sensors fabricated using stencil lithography

Applied Physics Letters

Volumn 82, Issue 7, 2003, Pages 1111-1113

  Champagne, A R ^a   Couture, A J ^a   Kuemmeth, F ^a   Ralph, D C ^a  

^a Laboratory of Atomic and Solid State Physics and Sibley School of Mechanical and Aerospace Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; EVAPORATION; MASKS; NANOSTRUCTURED MATERIALS; SENSORS;

STENCIL LITHOGRAPHY;

LITHOGRAPHY;

EID: 0037450241     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1554483     Document Type: Article

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