Design, fabrication, sensor fusion, and control of a micro X-Y stage media platform for probe-based storage systems

Mechatronics

Volumn 19, Issue 7, 2009, Pages 1158-1168

  Pang, Chee Khiang ^a,b   Lu, Yi ^a   Li, Chengchen ^a,b   Chen, Jian ^a   Zhu, Hong ^a   Yang, Jiaping ^a   Mou, Jianqiang ^a   Guo, Guoxiao ^a   Chen, Ben M ^b   Lee, Tong Heng ^b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

MEMS; Probe based storage systems; Self sensing actuation

Indexed keywords

FABRICATION; MAGNETIC STORAGE; MEMS; POLYMETHYL METHACRYLATES;

DECOUPLING CONTROLS; DRIVING VOLTAGES; MEDIA PLATFORMS; MICROMACHINING TECHNIQUES; SCANNING PROBE DATA STORAGE; SELF-SENSING ACTUATION; STORAGE SYSTEMS; SUPERPARAMAGNETIC EFFECT;

DIGITAL STORAGE;

EID: 70349862899     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2009.03.005     Document Type: Article

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