Universal equation for argon gas cluster sputtering yields

Journal of Physical Chemistry C

Volumn 117, Issue 24, 2013, Pages 12622-12632

  Seah, M P ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FRAGMENT SIZES; LINEAR DEPENDENCE; ORGANIC MATERIALS; RIGHT-HAND SIDES; SPUTTERING EFFECTS; SPUTTERING YIELDS; THRESHOLD ENERGY; UNIVERSAL EQUATION;

ATOMS; CLUSTER ANALYSIS; ESTERS; GOLD; INORGANIC COMPOUNDS; STYRENE;

ARGON;

EID: 84879430851     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp402684c     Document Type: Article

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