Molecular Surface Mass Spectrometry by SIMS

Surface Analysis - The Principal Techniques: Second Edition

Volumn , Issue , 2009, Pages 113-205

  Vickerman, John C ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Ambient method of desorption mass spectrometry; Basic concepts basic equation; Ionization of sputtered neutrals; Modes of analysis; Primary particle source, mass spectrometer, and secondary ions; Secondary ion formation; Secondary ion mass spectrometry (SIMS)

Indexed keywords

EID: 78650708805     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470721582.ch4     Document Type: Chapter

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