Size effect in cluster collision on solid surfaces

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 627-631

  Matsuo, Jiro ^a   Ninomiya, Satoshi ^a   Nakata, Yoshihiko ^a   Ichiki, Kazuya ^a   Aoki, Takaaki ^a,b   Seki, Toshio ^a,b  

^a KYOTO UNIVERSITY   (Japan)

^b Collaborative Research Center for Cluster Ion Beam Process Technology ^*  (Japan)

Author keywords

Cluster; Emission; Ion; SIMS

Indexed keywords

ATOMIC PHYSICS; GRAIN SIZE AND SHAPE; ION BOMBARDMENT; SPUTTERING; SURFACE TREATMENT;

CLUSTER COLLISION; CLUSTER SIZE; GAS CLUSTER; SURFACE ATOMS;

COLLOIDS;

EID: 33947679149     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.164     Document Type: Article

References (31)

1. Yamada I., Matsuo J., Toyoda N., and Kirkpatrick A. Mater. Sci. Eng. R 34 (2001) 231
2. Seki T., Matsuo J., Takaoka G.H., and Yamada I. Nucl. Instr. and Meth. B 59-60 (2003) 21
3. Akizuki M., Matsuo J., Harada M., Ogasawara S., Doi A., Yoneda K., Yamaguchi T., Takaoka G.H., Ascheron C.E., and Yamada I. Nucl. Instr. and Meth. B 99 (1995) 225
4. Qin W., Howson R.P., Akizuki M., Matsuo J., Takaoka G., and Yamada I. Mater. Chem. Phys. 54 1-3 (1998) 258
5. Toyoda N., Hagiwara N., Matsuo J., and Yamada I. Nucl. Instr. and Meth. B 148 (1999) 639
6. Fenner D.B., Torti R.P., Allen L.P., Toyoda N., Kirkpatrick A.R., Greer J.A., DiFilippo V., and Hautala J. Mat. Res. Soc. Symp. Proc. 585 (2000) 27
7. Goto K., Matsuo J., Tada Y., Tanaka T., Momiyama Y., Sugii T., and Yamada I. IEDM Tech. Dig. 471 (1997)
8. Aoki T., Matsuo J., and Takaoka G. Nucl. Instr. and Meth. B 202 (2003) 278
9. Toyoda N., Houzumi S., and Yamada I. Nucl. Instr. and Meth. B 241 (2005) 609
10. Toyoda N., Houzumi S., and Yamada I. Nucl. Instr. and Meth. B 242 (2005) 466
11. Houzumi S., Mochiji K., Toyoda N., and Yamada I. Jpn. J. Appl. Phys. 44 8 (2005) 6252
12. Toyoda N., Matsuo J., Aoki T., Yamada I., and Fenner D.B. Nucl. Instr. and Meth. B 190 (2002) 860
13. Matsuo J., Okubo C., Seki T., Aoki T., Toyoda N., and Yamada I. Nucl. Instr. and Meth. B 219 (2004) 463
14. Matsuo J., Toyoda N., Akizuki M., and Yamada I. Nucl. Instr. and Meth. B 121 (1997) 459
15. Gillen G., King R.L., and Chmara F. J. Vac. Sci. Technol. A 17 (1999) 845
16. Gillen G., Walker M., Thompson P., and Bennett J. J. Vac. Sci. Technol. B 18 (2000) 503
17. Gillen G., King L., Freibaum B., Lareau R., Bennett J., and Chmara F. J. Vac. Sci. Technol. A 19 (2001) 568
18. Van Stipdonk M.J., Harris R.D., and Schweikert E.A. Rapid Commun. Mass Spectrom. 10 (1996) 1987
19. Weibel D., Wong S., Lockyer N., Blenkinsopp P., Hill R., and Vickerman J.C. Anal. Chem. 75 (2003) 1754
20. Cheng J., and Winograd N. Anal. Chem. 77 (2005) 3651
21. Seki T., Murase T., and Matsuo J. Nucl. Instr. and Meth. B 242 (2006) 179
22. S. Ninomiya, K. Ichiki, Y. Nakata, T. Seki, T. Aoki, J. Matsuo, Nucl. Instr. and Meth. B, doi:10.1016/j.nimb.2006.12.074.
23. Weinkauf R., Walter K., Weickhardt C., Boesl U., and Schlag E.W. Z. Naturforschung A 44 (1989) 1219
24. Vlasak P.R., Beussman D.J., Davenport M.R., and Enke C.G. Rev. Sci. Instr. 67 (1996) 68
25. Stillinger F.H., and Weber T.A. Phys. Rev. B 31 (1985) 5632
26. Ziegler J.P., Biersack J.P., and Littmark U. The Stopping and Range of Ions in Solids (1985), Pergamon Press, New York
27. Bouneau S., Brunelle A., Della-Negra S., Depauw J., Jacquet D., Le Beyec Y., Pautrat M., Fallavier M., Poizat J.C., and Andersen H.H. Phys. Rev. B 65 (2002) 144106
28. Wittmaack K. Surf. Int. Anal. 24 (1996) 389
29. Staudtand C., and Wucher A. Phys. Rev. B 66 (2002) 75419
30. Staudt C., Heinrich R., and Wucher A. Nucl. Instr. and Meth. B 164-165 (2000) 677
31. Tanaka H., and Kanayama T. J. Vac. Sci. Technol. B 15 5 (1997) 1613