Physical and chemical sputterings of solid surfaces irradiated by ethanol cluster ion beams

Review of Scientific Instruments

Volumn 79, Issue 2, 2008, Pages

  Takaoka, Gikan H ^a   Kawashita, Masakazu ^a   Okada, Takeshi ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ETHANOL; GOLD; ION BOMBARDMENT; SILICON; SPUTTERING;

ACCELERATION VOLTAGE; ETHANOL CLUSTER ION BEAMS; INCIDENT ANGLE; SOLID SURFACES;

ION BEAMS;

EID: 40149108596     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2819326     Document Type: Article

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