An accurate semi-empirical equation for sputtering yields I: For argon ions

Surface and Interface Analysis

Volumn 37, Issue 5, 2005, Pages 444-458

  Seah, M P ^a   Clifford, C A ^a   Green, F M ^a   Gilmore, I S ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

AFM; Argon ions; Crater measurement; Polyatomic sputtering; Sputter depth profiling; Sputtering yields

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; IONS; OXIDATION; PRECIPITATION (CHEMICAL); SCATTERING; SPUTTERING; ULTRAHIGH VACUUM;

ARGON IONS; CRATER MEASUREMENTS; POLYATOMIC SPUTTERING; SPUTTER DEPTH PROFILING; SPUTTERING YIELDS;

ARGON;

EID: 18444377038     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.2032     Document Type: Article

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