SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium Proceedings

Volumn 1181, Issue , 2010, Pages 135-140

Sputtering yield measurements with size-selected gas cluster ion beams

(5) Ichiki, Kazuya a Ninomiya, Satoshi a Seki, Toshio a,b Aoki, Takaaki a,b Matsuol, Jiro a,b

a KYOTO UNIVERSITY (Japan)

b JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER ION BEAMS; CLUSTER IONS; CLUSTER SIZES; CLUSTER-SIZE DISTRIBUTION; GAS CLUSTER ION BEAMS; INCIDENT ENERGY; IRRADIATION DOSE; SI SUBSTRATES; SIZE RANGES; SPUTTERING YIELDS; TIME-OF-FLIGHT METHOD;

ION BEAMS; IONS;

SPUTTERING;

EID: 77952412923 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (3)

References (12)

1
- 0016519998
- H. H. Andersen and H. L. Bay, J. Appl. Phys. 46, 2416-2422 (1975)
- (1975) J. Appl. Phys. , vol.46 , pp. 2416-2422
- Andersen, H.H.¹ Bay, H.L.²

2
- 0003000979
- M. Benguerba, A. Brunelle, S. Della-Negra, J. Depauw, H. Joret, Y. Le Beyec, M. G. Blain, E. A. Schweikert, G. Ben Assayag and P. Sudraud, Nucl. Instr. Meth., B 62, 8-22 (1991)
- (1991) Nucl. Instr. Meth. B , vol.62 , pp. 8-22
- Benguerba, M.¹ Brunelle, A.² Della-Negra, S.³ Depauw, J.⁴ Joret, H.⁵ Le Beyec, Y.⁶ Blain, M.G.⁷ Schweikert, E.A.⁸ Assayag, G.B.⁹ Sudraud, P.¹⁰

3
- 0000007804
- H. H. Anderson, A. Brunelle, S. Della-Negra, J. Depauw, D. Jacquet and Y. Le Beyec, Phys. Rev. Lett, 80, 5433-5436 (1998)
- (1998) Phys. Rev. Lett , vol.80 , pp. 5433-5436
- Anderson, H.H.¹ Brunelle, A.² Della-Negra, S.³ Depauw, J.⁴ Jacquet, D.⁵ Le Beyec, Y.⁶

4
- 0035976031
- I. Yamada, J. Matsuo and N. Toyoda, A. Kirkpatrick, Mater. Sci. Eng., R 34, 231-295 (2001).
- (2001) Mater. Sci. Eng. R , vol.34 , pp. 231-295
- Yamada, I.¹ Matsuo, J.² Toyoda, N.³ Kirkpatrick, A.⁴

5
- 0036849805
- J. Song, D. Choi and W. Choi, Nucl. Instr. Meth., B 196, 275-278 (2002).
- (2002) Nucl. Instr. Meth. B , vol.196 , pp. 275-278
- Song, J.¹ Choi, D.² Choi, W.³

6
- 38849102382
- L. Rzeznik, B. Czerwinski, B. Garrison, N. Winograd and Z. Postawa, J. Phys. Chem., C 112, 521-531 (2008).
- (2008) J. Phys. Chem. C , vol.112 , pp. 521-531
- Rzeznik, L.¹ Czerwinski, B.² Garrison, B.³ Winograd, N.⁴ Postawa, Z.⁵

7
- 0037377295
- T. Aoki, J. Matsuo and G Takaoka, Nucl. Instr. Meth., B 202, 278-282 (2003).
- (2003) Nucl. Instr. Meth. B , vol.202 , pp. 278-282
- Aoki, T.¹ Matsuo, J.² Takaoka, G.³

8
- 28544440504
- N. Toyoda, S. Houzumi and I. Yamada, Nucl. Instr. Meth., B 242, 466-468 (2006).
- (2006) Nucl. Instr. Meth. B , vol.242 , pp. 466-468
- Toyoda, N.¹ Houzumi, S.² Yamada, I.³

9
- 34447258680
- K. Nakamura, S. Houzumi, N. Toyoda, K. Mochiji, T. Mitamura and I. Yamada, Nucl. Instr. Meth., B 261, 660-663 (2007).
- (2007) Nucl. Instr. Meth. B , vol.261 , pp. 660-663
- Nakamura, K.¹ Houzumi, S.² Toyoda, N.³ Mochiji, K.⁴ Mitamura, T.⁵ Yamada, I.⁶

10
- 56449095887
- K. Moritani, M. Hashinokuchi, J. Nakagawa, T. Kashiwagi, N. Toyoda and K. Mochiji, Appl. Sur. Sci, 255, 948-950 ( 2008).
- (2008) Appl. Sur. Sci , vol.255 , pp. 948-950
- Moritani, K.¹ Hashinokuchi, M.² Nakagawa, J.³ Kashiwagi, T.⁴ Toyoda, N.⁵ Mochiji, K.⁶

11
- 56449114449
- S. Ninomiya, Y. Nakata, Y. Honda, K. Ichiki, T. Seki, T. Aoki and J. Matsuo, Appl. Sur. Sci, 255,1588-1590(2008).
- (2008) Appl. Sur. Sci , vol.255 , pp. 1588-1590
- Ninomiya, S.¹ Nakata, Y.² Honda, Y.³ Ichiki, K.⁴ Seki, T.⁵ Aoki, T.⁶ Matsuo, J.⁷

12
- 0030096316
- Y. Yamamura and H. Tawara, Atomic Data and Nuclear Data Tables, 62, 149-253 (1996)
- (1996) Atomic Data and Nuclear Data Tables , vol.62 , pp. 149-253
- Yamamura, Y.¹ Tawara, H.²

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