|
Volumn 269, Issue 14, 2011, Pages 1578-1581
|
Effect of impact angle and projectile size on sputtering efficiency of solid benzene investigated by molecular dynamics simulations
|
Author keywords
Cluster projectiles; Molecular dynamics computer simulations; Organic materials; SIMS; SNMS; Sputtering
|
Indexed keywords
ANGULAR DEPENDENCE;
CLUSTER PROJECTILES;
CLUSTER SIZES;
COARSE-GRAINED;
DEPOSITED ENERGY;
IMPACT ANGLES;
INCIDENT ENERGY;
MOLECULAR DYNAMICS COMPUTER SIMULATIONS;
MOLECULAR DYNAMICS SIMULATIONS;
ORGANIC MATERIALS;
PRIMARY ENERGIES;
SNMS;
SPUTTERING YIELDS;
BENZENE;
COMPUTATIONAL METHODS;
COMPUTER SIMULATION;
DYNAMICS;
INVESTMENTS;
PROJECTILES;
SURFACES;
MOLECULAR DYNAMICS;
|
EID: 79959248992
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2010.12.026 Document Type: Conference Paper |
Times cited : (36)
|
References (11)
|