Energy effects on the sputtering yield of Si bombarded with gas cluster ion beams

AIP Conference Proceedings

Volumn 1321, Issue , 2010, Pages 294-297

  Ichiki, K ^a   Ninomiya, S ^a,b   Seki, T ^a,b   Aoki, T ^a,b   Matsuo, J ^a,b  

^a KYOTO UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Ar cluster; Collision; Energy loss; Residual gas; Sputtering yield

Indexed keywords

EID: 79251573221     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3548384     Document Type: Conference Paper

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