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Surface and Interface Analysis

Volumn 45, Issue 1, 2013, Pages 158-162

Analysis of organic multilayers and 3D structures using Ar cluster ions

(5) Niehuis, E a Mollers R a Rading, D a Cramer, H G a Kersting, R b

a UNIVERSITY OF MÜNSTER (Germany)

b TASCON GMBH (Germany)

Author keywords

Ar cluster sputtering; depth resolution; dual beam depth profiling; Irganox delta layers; OLED analysis; TOF SIMS

Indexed keywords

DELTA LAYERS; DEPTH RESOLUTION; DUAL-BEAM DEPTH PROFILING; OLED ANALYSIS; TOF SIMS;

CLUSTER ANALYSIS; LIGHT EMITTING DIODES; MODEL STRUCTURES; MULTILAYERS; SECONDARY ION MASS SPECTROMETRY; THREE DIMENSIONAL COMPUTER GRAPHICS;

ATOMS;

EID: 84872873714 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.5079 Document Type: Conference Paper

Times cited : (51)

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