Graphene MEMS: AFM probe performance improvement

ACS Nano

Volumn 7, Issue 5, 2013, Pages 4164-4170

  Martin Olmos, Cristina ^a,b   Rasool, Haider Imad ^a,b,c   Weiller, Bruce H ^d   Gimzewski, James K ^a,b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b CALIFORNIA NANOSYSTEMS INSTITUTE   (United States)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^d AEROSPACE CORPORATION   (United States)

Author keywords

AFM; graphene; MEMS; probes; SU 8

Indexed keywords

AFM; CONTINUOUS LAYERS; FABRICATION METHOD; GRAPHENE COATINGS; GRAPHENE LAYERS; PARALLEL TECHNOLOGY; PERFORMANCE IMPROVEMENTS; SU-8;

FABRICATION; MEMS; PROBES; SILICON WAFERS;

GRAPHENE;

GRAPHITE; POLYMER;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; ELECTRICAL EQUIPMENT; EQUIPMENT; MECHANICS; METHODOLOGY; MICROTECHNOLOGY;

ELECTRICAL EQUIPMENT AND SUPPLIES; GRAPHITE; MECHANICAL PROCESSES; MICROSCOPY, ATOMIC FORCE; MICROTECHNOLOGY; POLYMERS;

EID: 84878330312     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn400557b     Document Type: Article

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