Nanoindentation testing of SU-8 photoresist mechanical properties

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 942-944

  Al Halhouli, A T ^a   Kampen, I ^a   Krah, T ^a   Buttgenbach S ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Nanoindentation; SU 8; Young's modulus

Indexed keywords

ELASTIC MODULI; MEASUREMENT THEORY; NANOMECHANICS; PHOTORESISTS;

BERKOVICH-SHAPED INDENTER; NANOMECHANICAL TRIBOINDENTER;

NANOINDENTATION;

EID: 44149103171     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.033     Document Type: Article

References (6)

1. B. Hoxhold, M. Kirchhoff, S. Bütefisch, S. Büttgenbach, in: XX Eurosensors 2006, Göteborg, 2006, pp. 190-191.
2. Dellmann L., Roth S., Beuret C., Racine G.-A., Lorenz H., Despont M., Vettiger P., and Rooij N.F. Sensors Actuators A 70 (1998) 42-47
3. Sato H., Matsumura H., Keino S., and Shoji S. J. Micromech. Microeng 16 (2006) 2318-2322
4. Khoo H., Liu K., and Tseng F. J. Micromech. Microeng. 13 (2003) 82-831
5. M. Hopcropft, T. Kramer, G. Kim, K. Takashima, Y. Higo, D. Moore, J. Brugger, in: ATEM'03, JSME-MMD, 2003.
6. Hay J., and Pharr G. In: Kuhn H., and Medlin D. (Eds). ASM Handbook, vol. 8: Mechanical Testing and Evaluation. 10th ed. (2000), ASM International 232-243