All-photoplastic, soft cantilever cassette probe for scanning force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 617-620

  Genolet, G ^a,c   Despont, M ^a   Vettiger, P ^a   Anselmetti, D ^b   De Rooij, N F ^c  

^a IBM RESEARCH ZURICH   (Switzerland)

^b NOVARTIS PHARMA AG   (Switzerland)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MOLDS; PHOTOPOLYMERIZATION; PROBES;

PHOTOPLASTIC CASSETTE PROBES;

OPTICAL MICROSCOPY;

EID: 0034155541     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591248     Document Type: Article

References (7)

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