Advanced atomic force microscopy probes: Wear resistant designs

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3090-3093

  Liu, H ^a   Klonowski, M ^a   Kneeburg, D ^a   Dahlen, G ^a   Osborn, M ^a   Bao, T ^a  

^a VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSIONS; PROBE MATERIALS; SHAPE CHANGE; WEAR RESISTANT DESIGNS;

OPTICAL DESIGN; PROBES; RELIABILITY; SUBSTRATES; WEAR OF MATERIALS; WEAR RESISTANCE;

ATOMIC FORCE MICROSCOPY;

EID: 29044436295     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2127936     Document Type: Article

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