Improved properties of epoxy nanocomposites for specific applications in the field of MEMS/NEMS

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1075-1079

  Voigt, Anja ^a   Heinrich, Marina ^a   Martin, Cristina ^b   Llobera, Andreu ^b   Gruetzner, Gabi ^a   Pérez Murano, Francesc ^b  

^a MICRO RESIST TECHNOLOGY GMBH   (Germany)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Epoxy nanocomposites; Hybrid material; MEMS; Silica; SiO2 nanoparticle

Indexed keywords

EPOXY RESINS; LITHOGRAPHY; MEMS; NANOCOMPOSITES; PATTERN RECOGNITION; POLYMER MATRIX; REFRACTIVE INDEX;

EPOXY NANOCOMPOSITES; HYBRID MATERIAL; PATTERNABLE MATERIAL; SILICA-DOPED EPOXY MATERIALS; WAVEGUIDING APPLICATIONS;

MICROELECTRONICS;

EID: 34247607764     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.046     Document Type: Article

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