Opto-thermal actuation in double layer polymer microcantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8107, Issue , 2011, Pages

  Martin Olmos, C ^a   Villanueva, L G ^a   Llobera, A ^a   Voigt, A ^b   Gruetzner, G ^b   Abadal, G ^c   Perez Murano, F ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b MICRO RESIST TECHNOLOGY GMBH   (Germany)

^c UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Actuator; Opto thermal; Polymer

Indexed keywords

DIFFERENT MECHANISMS; DOUBLE LAYERS; ELECTRICAL CONDUCTIVITY; FUNCTIONAL PROPERTIES; HIGH ASPECT RATIO; MECHANICAL ENERGIES; MEMS/NEMS; MICRO-CANTILEVERS; OPTO-THERMAL; PHYSICAL CONTACTS; PLASTIC MEMS; POTENTIAL IMPACTS; RESULTING MATERIALS;

ACTUATORS; ASPECT RATIO; ELECTRIC CONDUCTIVITY; MECHANICAL ENGINEERING; MECHANICS; POLYMERS; THERMODYNAMIC PROPERTIES;

FUNCTIONAL POLYMERS;

EID: 80053547512     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.897353     Document Type: Conference Paper

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