Microfabricated photoplastic cantilever with integrated photoplastic/carbon based piezoresistive strain sensor

Applied Physics Letters

Volumn 88, Issue 11, 2006, Pages

  Gammelgaard, L ^a   Rasmussen, P A ^a   Calleja, M ^a   Vettiger, P ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON BLACK; OPTICAL SENSORS; PHOTOLITHOGRAPHY; POLYMERS; ULTRASONICS;

PHOTOPLASTIC CANTILEVERS; POLYMER COMPOSITES; SU-8 POLYMERS;

PIEZOELECTRIC DEVICES;

EID: 33645146392     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2186396     Document Type: Article

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