Special cantilever geometry for the access of higher oscillation modes in atomic force microscopy

Applied Physics Letters

Volumn 89, Issue 3, 2006, Pages

  Sadewasser, S ^a,b   Villanueva, G ^b   Plaza, J A ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; IMAGING SYSTEMS; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS; PHOTODIODES; SENSORS;

CANTILEVER GEOMETRY; MASS DETECTION; ULTRAHIGH VACUUM KELVIN PROBE FORCE MICROSCOPE;

ATOMIC FORCE MICROSCOPY;

EID: 33746318626     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2226993     Document Type: Article

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