Temperature-dependent growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputtering

Applied Surface Science

Volumn 274, Issue , 2013, Pages 371-377

  Zhang, Chi ^a   Chen, Xin Liang ^a   Geng, Xin Hua ^a   Tian, Cong Sheng ^a   Huang, Qian ^a   Zhao, Ying ^a   Zhang, Xiao Dan ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

Reactive magnetron sputtering; Solar cells; Substrate temperature; W doping; ZnO thin films

Indexed keywords

HALL MOBILITY; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; MICROSTRUCTURE; OPTICAL FILMS; OXIDE FILMS; SEMICONDUCTOR DOPING; SOLAR CELLS; TUNGSTEN COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE; ZINC SULFIDE;

HEXAGONAL WURTZITE STRUCTURE; OPTICAL AND ELECTRICAL PROPERTIES; PREFERENTIAL GROWTH ORIENTATION; REACTIVE MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; TEMPERATURE DEPENDENT; W-DOPING; ZNO THIN FILM;

THIN FILMS;

EID: 84876944293     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.03.069     Document Type: Article

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