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Volumn 534, Issue , 2013, Pages 459-464

Synthesis and property of noria (water-wheel like macrocycle) derivatives with pendant alkoxyl and adamantyl ester groups, and their application for extreme ultraviolet resist

(5) Niina, Nobumitsu a Kudo, Hiroto b Oizumi, Hiroaki c Itani, Toshiro c Nishikubo, Tadatomi a

a KANAGAWA UNIVERSITY (Japan)

b KANSAI UNIVERSITY (Japan)

c SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC (Japan)

Author keywords

Cyclic oligomer; Dynamic covalent chemistry; Extreme ultraviolet; Noria; Photo acid generator; Resist; Synthesis

Indexed keywords

CYCLIC OLIGOMERS; DYNAMIC COVALENT CHEMISTRY; EXTREME ULTRAVIOLET; NORIA; PHOTOACID GENERATORS; RESIST;

ESTERS; OLIGOMERS; SUBSTITUTION REACTIONS; SYNTHESIS (CHEMICAL);

ESTERIFICATION;

EID: 84876667737 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.02.016 Document Type: Article

Times cited : (21)

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