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Journal of Materials Chemistry

Volumn 18, Issue 30, 2008, Pages 3588-3592

A novel noria (water-wheel-like cyclic oligomer) derivative as a chemically amplified electron-beam resist material

(8) Kudo, Hiroto a Watanabe, Daisuke a Nishikubo, Tadatomi a Maruyama, Ken b Shimizu, Daisuke b Kai, Toshiyuki b Shimokawa, Tsutomu b Ober, Christopher K c

a KANAGAWA UNIVERSITY (Japan)

b JSR CORPORATION (Japan)

c Cornell University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ESTERS; ORGANIC COMPOUNDS; POLYMERS;

ELECTRON-BEAM (EB) RESIST; MOLECULAR WATER; T BUTYL ESTER;

WHEELS;

EID: 47749106514 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/b805394d Document Type: Article

Times cited : (53)

References (27)

1
- 0035747323
- A. M. Goethals G. Vandenberghe I. Pollentier M. Ercken P. De Bisschop M. Maenhoudt K. Ronse J. Photopolym. Sci. Technol. 2001 14 333
- (2001) J. Photopolym. Sci. Technol. , vol.14 , pp. 333
- Goethals, A.M.¹ Vandenberghe, G.² Pollentier, I.³ Ercken, M.⁴ De B., P.⁵ Maenhoudt, M.⁶ Ronse, K.⁷

2
- 0348252166
- For example:
- H. Ito J. Polym. Sci., Part A: Polym. Chem. 2003 41 3863
- (2003) J. Polym. Sci., Part A: Polym. Chem. , vol.41 , pp. 3863
- Ito, H.¹

3
- 12044253529
- S. A. MacDonald C. G. Willson J. M. J. Frechet Acc. Chem. Res. 1994 27 151
- (1994) Acc. Chem. Res. , vol.27 , pp. 151
- MacDonald, S.A.¹ Willson, C.G.² Frechet, J.M.J.³

4
- 0036355920
- C. G. Willson B. C. Trinque B. P. Osborn C. Chambers R. Y. Hedieh T. Chiba P. Zimmerma D. Miller W. Conley J. Photopolym. Sci. Technol. 2002 15 583
- (2002) J. Photopolym. Sci. Technol. , vol.15 , pp. 583
- Willson, C.G.¹ Trinque, B.C.² Osborn, B.P.³ Chambers, C.⁴ Hedieh, R.Y.⁵ Chiba, T.⁶ Zimmerma, P.⁷ Miller, D.⁸ Conley, W.⁹

5
- 0036362377
- C. K. Ober K. Douki V. R. Vohra Y. Kwark X. Liu W. Conley D. Miller P. Zimmerman J. Photopolym. Sci. Technol. 2002 15 603
- (2002) J. Photopolym. Sci. Technol. , vol.15 , pp. 603
- Ober, C.K.¹ Douki, K.² Vohra, V.R.³ Kwark, Y.⁴ Liu, X.⁵ Conley, W.⁶ Miller, D.⁷ Zimmerman, P.⁸

6
- 9744270903
- H. Ito G. M. Wallraff N. Fender P. J. Brock C. E. Larson H. D. Truong G. Breyta D. Miller M. Sherwood R. D. Allen J. Photopolym. Sci. Technol. 2002 15 693
- (2002) J. Photopolym. Sci. Technol. , vol.15 , pp. 693
- Ito, H.¹ Wallraff, G.M.² Fender, N.³ Brock, P.J.⁴ Larson, C.E.⁵ Truong, H.D.⁶ Breyta, G.⁷ Miller, D.⁸ Sherwood, M.⁹ Allen, R.D.¹⁰

7
- 0038168175
- For example:
- Z. M. Fresco N. Bensel I. Suez S. A. Backer J. M. J. Frechet J. Photopolym. Sci. Technol. 2003 16 27
- (2003) J. Photopolym. Sci. Technol. , vol.16 , pp. 27
- Fresco, Z.M.¹ Bensel, N.² Suez, I.³ Backer, S.A.⁴ Frechet, J.M.J.⁵

8
- 0022493649
- C. G. Willson H. Ito J. M. J. Frechet T. G. Tessier F. M. Houlihan J. Electrochem. Soc. 1986 133 181
- (1986) J. Electrochem. Soc. , vol.133 , pp. 181
- Willson, C.G.¹ Ito, H.² Frechet, J.M.J.³ Tessier, T.G.⁴ Houlihan, F.M.⁵

9
- 0003864280
- J. P. Fouassie and J. F. Rabek, Elsevier, London, p. 237
- H. Ito, in Radiation Curing in Polymer Science and Technology, ed., J. P. Fouassie, and, J. F. Rabek, Elsevier, London, 1993, vol. 4, p. 237
- (1993) Radiation Curing in Polymer Science and Technology, Ed. , vol.4
- Ito In, H.¹

10
- 12044253529
- S. A. Macdonard C. G. Willson J. M. J. Frechet Acc. Chem. Res. 1994 27 151
- (1994) Acc. Chem. Res. , vol.27 , pp. 151
- MacDonard, S.A.¹ Willson, C.G.² Frechet, J.M.J.³

11
- 0001325302
- H. Ito, E. Reichmanis, O. Naramasu, and T. Ueno, American Chemical Society, Washington, DC, p. 208
- H. Ito, N. Seehof, R. Sato, T. Nakayama, M. Ueda, in Micro- and Nano-Patterning Polymers, ed., H. Ito, E. Reichmanis, O. Naramasu, and, T. Ueno, American Chemical Society, Washington, DC, 1998, p. 208
- (1998) Micro- And Nano-Patterning Polymers, Ed.
- Ito, H.¹ Seehof, N.² Sato, R.³ Nakayama, T.⁴ Ueda In, M.⁵

12
- 33746922334
- J. Dai S. W. Chang A. Hamad D. Yang N. Felix C. K. Ober Chem. Mater. 2006 18 3404
- (2006) Chem. Mater. , vol.18 , pp. 3404
- Dai, J.¹ Chang, S.W.² Hamad, A.³ Yang, D.⁴ Felix, N.⁵ Ober, C.K.⁶

13
- 31844440098
- T. Hirayama D. Shiono S. Matsumaru T. Ogata H. Hada J. Onodera T. Arai T. Sakamizu A. Yamaguchi H. Shiraishi H. Fukuda M. Ueda J. Appl. Phys. 2005 44 5484
- (2005) J. Appl. Phys. , vol.44 , pp. 5484
- Hirayama, T.¹ Shiono, D.² Matsumaru, S.³ Ogata, T.⁴ Hada, H.⁵ Onodera, J.⁶ Arai, T.⁷ Sakamizu, T.⁸ Yamaguchi, A.⁹ Shiraishi, H.¹⁰ Fukuda, H.¹¹ Ueda, M.¹²

14
- 4444331156
- T. Kadota H. Kageyama F. Wakaya K. Gamo Y. Shirota Chem. Lett. 2004 33 706
- (2004) Chem. Lett. , vol.33 , pp. 706
- Kadota, T.¹ Kageyama, H.² Wakaya, F.³ Gamo, K.⁴ Shirota, Y.⁵

15
- 0041934994
- T. Nakayama K. Haga O. Haba M. Ueda Chem. Lett. 1997 265
- (1997) Chem. Lett. , pp. 265
- Nakayama, T.¹ Haga, K.² Haba, O.³ Ueda, M.⁴

16
- 0001379665
- M. Ueda D. Takahashi T. Nakamura O. Haba Chem. Mater. 1998 10 2230
- (1998) Chem. Mater. , vol.10 , pp. 2230
- Ueda, M.¹ Takahashi, D.² Nakamura, T.³ Haba, O.⁴

17
- 0001512129
- J. Fujita Y. Onishi Y. Ochiai S. Matsui Appl. Phys. Lett. 1996 68 1297
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1297
- Fujita, J.¹ Onishi, Y.² Ochiai, Y.³ Matsui, S.⁴

18
- 0034583904
- Y. Ochiai S. Manako H. Yamamoto T. Teshima J. Fujita E. J. Nomura J. Photopolym. Sci. Technol. 2000 13 413
- (2000) J. Photopolym. Sci. Technol. , vol.13 , pp. 413
- Ochiai, Y.¹ Manako, S.² Yamamoto, H.³ Teshima, T.⁴ Fujita, J.⁵ Nomura, E.J.⁶

19
- 0032639949
- T. Nishikubo A. Kameyama K. Tsutsui M. Iyo J. Polym. Sci., Part A: Polym. Chem. 1999 37 1805
- (1999) J. Polym. Sci., Part A: Polym. Chem. , vol.37 , pp. 1805
- Nishikubo, T.¹ Kameyama, A.² Tsutsui, K.³ Iyo, M.⁴

20
- 0032592229
- M. Iyo K. Tsutsui A. Kameyama T. Nishikubo J. Polym. Sci., Part A: Polym. Chem. 1999 37 3071
- (1999) J. Polym. Sci., Part A: Polym. Chem. , vol.37 , pp. 3071
- Iyo, M.¹ Tsutsui, K.² Kameyama, A.³ Nishikubo, T.⁴

21
- 0035871273
- T. Nishikubo A. Kameyama K. Tsutsui J. Polym. Sci., Part A: Polym. Chem. 2001 39 1169
- (2001) J. Polym. Sci., Part A: Polym. Chem. , vol.39 , pp. 1169
- Nishikubo, T.¹ Kameyama, A.² Tsutsui, K.³

22
- 0036567832
- T. Nishikubo A. Kameyama H. Kudo K. Tsutsui J. Polym. Sci., Part A: Polym. Chem. 2002 40 1293
- (2002) J. Polym. Sci., Part A: Polym. Chem. , vol.40 , pp. 1293
- Nishikubo, T.¹ Kameyama, A.² Kudo, H.³ Tsutsui, K.⁴

23
- 47749105702
- T. Nishikubo, unpublished data
- Nishikubo Unpublished Data, T.¹

24
- 33845491919
- H. Kudo R. Hayashi K. Mitani T. Yokozawa N. C. Kasuga T. Nishikubo Angew. Chem., Int. Ed. 2006 45 7948
- (2006) Angew. Chem., Int. Ed. , vol.45 , pp. 7948
- Kudo, H.¹ Hayashi, R.² Mitani, K.³ Yokozawa, T.⁴ Kasuga, N.C.⁵ Nishikubo, T.⁶

25
- 35148825102
- X. André J. K. Lee A. DeSilva C. K. Ober H. B. Cao H. Deng H. Kudo D. Watanabe T. Nishikubo Proc. SPIE-Int. Soc. Opt. Eng. 2007 6519 65194B
- (2007) Proc. SPIE-Int. Soc. Opt. Eng. , vol.6519
- André, X.¹ Lee, J.K.² Desilva, A.³ Ober, C.K.⁴ Cao, H.B.⁵ Deng, H.⁶ Kudo, H.⁷ Watanabe, D.⁸ Nishikubo, T.⁹

26
- 2342628549
- H. Kudo K. Mitani T. Nishikubo M. Masaya T. Miyashita Bull. Chem. Soc. Jpn. 2004 77 819
- (2004) Bull. Chem. Soc. Jpn. , vol.77 , pp. 819
- Kudo, H.¹ Mitani, K.² Nishikubo, T.³ Masaya, M.⁴ Miyashita, T.⁵

27
- 9744244935
- H. Kudo K. Mitani S. Koyama T. Nishikubo Bull. Chem. Soc. Jpn. 2004 77 2109
- (2004) Bull. Chem. Soc. Jpn. , vol.77 , pp. 2109
- Kudo, H.¹ Mitani, K.² Koyama, S.³ Nishikubo, T.⁴

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