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Volumn 25, Issue 5, 2012, Pages 587-592

Extreme Ultraviolet (EUV)-resist material based on noria (Water Wheel-like Macrocycle) derivatives with pendant alkoxyl and adamantyl ester groups

Author keywords

Adamantane; Chemically amplification; Extreme ultraviolet; Noria; Resist

Indexed keywords


EID: 84867883425     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.25.587     Document Type: Article
Times cited : (15)

References (31)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.