SCOPUS 정보 검색 플랫폼

Volumn 19, Issue 26, 2009, Pages 4622-4626

Environmentally friendly patterning of molecular waterwheel (Noria) in supercritical carbon dioxide

(6) Tanaka, Manabu a Rastogi, Abhinav a,b Kudo, Hiroto c Watanabe, Daisuke c Nishikubo, Tadatomi c Ober, Christopher K a

a Cornell University (United States)

b Department of Obstetrics Gynecology (United States)

c KANAGAWA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPROTECTION; DEVELOPMENT PROCESS; ENVIRONMENTALLY-FRIENDLY; FILM-FORMING; FT-IR SPECTRUM; LITHOGRAPHIC PATTERNS; LITHOGRAPHIC PROPERTIES; MOLECULAR GLASS; NEGATIVE TONES; PHOTO-INDUCED; SUB-100 NM; SUPERCRITICAL CARBON DIOXIDES; THERMAL STABILITY;

CARBON DIOXIDE; METAL CASTING;

SUPERCRITICAL FLUID EXTRACTION;

EID: 67649726141 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/b821475a Document Type: Article

Times cited : (30)

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