First experimental proof for aberration correction in XPEEM: Resolution, Transmission enhancement, And limitation by space charge effects

Ultramicroscopy

Volumn 126, Issue , 2013, Pages 23-32

  Schmidt, Th ^a   Sala, A ^a   Marchetto, H ^a   Umbach, E ^b   Freund, H J ^a  

^a FRITZ HABER INSTITUT DER MAX PLANCK GESELLSCHAFT   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Aberration correction; Lateral resolution; Low energy electron microscopy; Space charge; Transmission; X ray induced photoelectron emission microscopy

Indexed keywords

ABERRATION CORRECTION; ABERRATION-CORRECTED; BEST VALUE; ELECTRON PULSE; ELEMENT SPECIFIC; IMAGE BLURRING; LATERAL RESOLUTION; LOW ENERGY ELECTRON MICROSCOPY; MODERATE RESOLUTION; OPTICAL AXIS; OPTIMIZED SYSTEM; PHOTOELECTRON EMISSION MICROSCOPY; SOFT X-RAY; SPACE CHARGE EFFECTS; TECHNICAL SOLUTIONS; THEORETICAL LIMITS; TRANSMISSION ENHANCEMENT;

ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; GOLD; KINETICS; LIGHT SOURCES; PHOTOELECTRONS; PHOTONS; TRANSMISSIONS; X RAYS;

ELECTRIC SPACE CHARGE;

ABERRATION CORRECTION; ANALYTICAL PARAMETERS; ARTICLE; ELECTRON MICROSCOPY; ENERGY FILTERED TRANSMISSION ELECTRON MICROSCOPY; ENERGY YIELD; EXPERIMENTAL STUDY; IMAGE ENHANCEMENT; IMAGE QUALITY; IMAGING SYSTEM; KINETICS; LIGHT; LIMIT OF DETECTION; LOW ENERGY ELECTRON MICROSCOPY; MICROSCOPY; OPTICAL RESOLUTION; PROCESS OPTIMIZATION; SURFACE CHARGE; X RAY; X RAY INDUCED PHOTOELECTRON EMISSION MICROSCOPY;

EID: 84873160988     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2012.11.004     Document Type: Article

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