Measuring and correcting aberrations of a cathode objective lens

Ultramicroscopy

Volumn 111, Issue 4, 2011, Pages 273-281

  Tromp, R M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Aberration correction; Aberrations; Cathode lens

Indexed keywords

ABERRATION CORRECTION; CATHODE LENS; CHROMATIC ABERRATION; LOW ENERGY ELECTRON MICROSCOPY; OBJECTIVE LENS; PHOTOELECTRON EMISSION MICROSCOPY; PRACTICAL METHOD; SPHERICAL ABERRATIONS;

SPHERES;

OPTICAL INSTRUMENT LENSES;

ARTICLE; CATHODE OBJECTIVE LENS; ELECTROMAGNETIC FIELD; ELECTRON MICROSCOPY; EQUIPMENT DESIGN; LOW ENERGY ELECTRON MICROSCOPY; MATHEMATICAL MODEL; OPTICAL INSTRUMENTATION; OPTICAL RESOLUTION; PHOTO ELECTRON EMISSION MICROSCOPY; PROCESS DESIGN; SYSTEMATIC ERROR; THEORETICAL STUDY;

EID: 78651354657     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2010.11.029     Document Type: Article

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