SCOPUS 정보 검색 플랫폼

Volumn 51, Issue 12, 2012, Pages

The structure and bonding state for fullerene-like carbon nitride films with high hardness formed by electron cyclotron resonance plasma sputtering

(4) Kamata, Tomoyuki a Niwa, Osamu a Umemura, Shigeru b Hirono, Shigeru c

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

b CHIBA INSTITUTE OF TECHNOLOGY (Japan)

c MES Afty Corporation (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING STATE; CN FILM; ELECTRON CYCLOTRON RESONANCE PLASMA; FULLERENE-LIKE CARBON NITRIDE; GRAPHENE SHEETS; HEXAGONAL NETWORKS; HIGH DENSITY; HIGH HARDNESS; HIGH-NITROGEN; LATTICE IMAGES; LOW HARDNESS; NITROGEN CONCENTRATIONS; NITROGEN INCORPORATION; SUBSTRATE HEATING;

CARBON NITRIDE; CYANIDES; ELECTRON CYCLOTRON RESONANCE; FULLERENES; GRAPHENE; HARDNESS; MICROSTRUCTURE; PHASE DIAGRAMS; PHOTOELECTRONS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

EID: 84872576117 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.51.125602 Document Type: Article

Times cited : (8)

References (47)

1
- 20444373328
- A. Y. Liu and M. L. Cohen: Science 245 (1989) 841.
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

2
- 0033165094
- S. Matsumoto, E. Q. Xie, and F. Izumi: Diamond Relat. Mater. 8 (1999) 1175.
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1175
- Matsumoto, S.¹ Xie, E.Q.² Izumi, F.³

3
- 0032692055
- S. Muhl and J. M. Mendez: Diamond Relat. Mater. 8 (1999) 1809.
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1809
- Muhl, S.¹ Mendez, J.M.²

4
- 0034324941
- T. Malkow: Mater. Sci. Eng. A 292 (2000) 112.
- (2000) Mater. Sci. Eng. A , vol.292 , pp. 112
- Malkow, T.¹

5
- 0028445814
- H. Sjöström, I. Ivanov, M. Johansson, L. Hultman, J. E. Sundgren, S. V. Hainsworth, T. F. Page, and L. R. Wallenberg: Thin Solid Films 246 (1994) 103.
- (1994) Thin Solid Films , vol.246 , pp. 103
- Sjöström, H.¹ Ivanov, I.² Johansson, M.³ Hultman, L.⁴ Sundgren, J.E.⁵ Hainsworth, S.V.⁶ Page, T.F.⁷ Wallenberg, L.R.⁸

6
- 0342945364
- H. Sjöström, S. Stafström, M. Boman, and J. E. Sundgren: Phys. Rev. Lett. 75 (1995) 1336.
- (1995) Phys. Rev. Lett. , vol.75 , pp. 1336
- Sjöström, H.¹ Stafström, S.² Boman, M.³ Sundgren, J.E.⁴

7
- 0343215213
- N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren: Phys. Rev. B 59 (1999) 5162.
- (1999) Phys. Rev. B , vol.59 , pp. 5162
- Hellgren, N.¹ Johansson, M.P.² Broitman, E.³ Hultman, L.⁴ Sundgren, J.E.⁵

8
- 0000178856
- S. Stafström: Appl. Phys. Lett. 77 (2000) 3941.
- (2000) Appl. Phys. Lett. , vol.77 , pp. 3941
- Stafström, S.¹

9
- 79955999999
- S. Hirono, S. Umemura, M. Tomita, and R. Kaneko: Appl. Phys. Lett. 80 (2002) 425.
- (2002) Appl. Phys. Lett. , vol.80 , pp. 425
- Hirono, S.¹ Umemura, S.² Tomita, M.³ Kaneko, R.⁴

10
- 10944235811
- S. Hirono, S. Umemura, M. Tomita, and R. Kaneko: Mol. Cryst. Liq. Cryst. 386 (2002) 179.
- (2002) Mol. Cryst. Liq. Cryst. , vol.386 , pp. 179
- Hirono, S.¹ Umemura, S.² Tomita, M.³ Kaneko, R.⁴

11
- 0004408202
- R. Kaneko, S. Oguchi, T. Miyamoto, Y. Andoh, and S. Miyake: STLE Spec. Publ. SP-29 (1990) 31.
- (1990) STLE Spec. Publ. , vol.SP-29 , pp. 31
- Kaneko, R.¹ Oguchi, S.² Miyamoto, T.³ Andoh, Y.⁴ Miyake, S.⁵

12
- 0026899187
- D. B. Bogy: J. Tribol. 114 (1992) 493.
- (1992) J. Tribol. , vol.114 , pp. 493
- Bogy, D.B.¹

13
- 0000656203
- S. Miyake, S. Watanabe, H. Miyazawa, M. Murakawa, R. Kaneko, and T. Miyamoto: Appl. Phys. Lett. 65 (1994) 3206.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 3206
- Miyake, S.¹ Watanabe, S.² Miyazawa, H.³ Murakawa, M.⁴ Kaneko, R.⁵ Miyamoto, T.⁶

14
- 0030293680
- S. Umemura, Y. Andoh, S. Hirono, T. Miyamoto, and R. Kaneko: Philos. Mag. A 74 (1996) 1143.
- (1996) Philos. Mag. A , vol.74 , pp. 1143
- Umemura, S.¹ Andoh, Y.² Hirono, S.³ Miyamoto, T.⁴ Kaneko, R.⁵

15
- 33744538097
- D. A. Shirley: Phys. Rev. B 5 (1972) 4709.
- (1972) Phys. Rev. B , vol.5 , pp. 4709
- Shirley, D.A.¹

16
- 0037348089
- J. Neidhardt, Z. Czigany, I. F. Brunell, and L. Hultman: J. Appl. Phys. 93 (2003) 3002.
- (2003) J. Appl. Phys. , vol.93 , pp. 3002
- Neidhardt, J.¹ Czigany, Z.² Brunell, I.F.³ Hultman, L.⁴

17
- 84872539694
- L. Pauling: Eng. Technol. Appl. Sci. (1985) 16.
- (1985) Eng. Technol. Appl. Sci. , pp. 16
- Pauling, L.¹

18
- 0035945156
- N. Hellgren, J. Guo, C. Sathe, A. Agui, J. Nordgren, Y. Luo, H. Agren, and J. E. Sundgren: Appl. Phys. Lett. 79 (2001) 4348.
- (2001) Appl. Phys. Lett. , vol.79 , pp. 4348
- Hellgren, N.¹ Guo, J.² Sathe, C.³ Agui, A.⁴ Nordgren, J.⁵ Luo, Y.⁶ Agren, H.⁷ Sundgren, J.E.⁸

19
- 8744260032
- W. J. Gammon, G. L. Hoatson, B. C. Holloway, R. L. Vold, and A. C. Reilly: Phys. Rev. B 68 (2003) 195401.
- (2003) Phys. Rev. B , vol.68 , pp. 195401
- Gammon, W.J.¹ Hoatson, G.L.² Holloway, B.C.³ Vold, R.L.⁴ Reilly, A.C.⁵

20
- 0035521916
- N. Hellgren, N. Lin, E. Broitman, V. Serin, S. E. Grillo, R. Twesten, I. Petrov, C. Colliex, L. Hultman, and J. E. Sundgren: J. Mater. Res. 16 (2001) 3188.
- (2001) J. Mater. Res. , vol.16 , pp. 3188
- Hellgren, N.¹ Lin, N.² Broitman, E.³ Serin, V.⁴ Grillo, S.E.⁵ Twesten, R.⁶ Petrov, I.⁷ Colliex, C.⁸ Hultman, L.⁹ Sundgren, J.E.¹⁰

21
- 0037843032
- R. Ohta, K. H. Lee, N. Saito, Y. Inoue, H. Sugimura, and O. Takai: Thin Solid Films 434 (2003) 296.
- (2003) Thin Solid Films , vol.434 , pp. 296
- Ohta, R.¹ Lee, K.H.² Saito, N.³ Inoue, Y.⁴ Sugimura, H.⁵ Takai, O.⁶

22
- 4043169083
- J. Neidhardt, L. Hultman, and Z. Czigany: Carbon 42 (2004) 2729.
- (2004) Carbon , vol.42 , pp. 2729
- Neidhardt, J.¹ Hultman, L.² Czigany, Z.³

23
- 34547353413
- J. Neidhardt and L. Hultman: J. Vac. Sci. Technol. A 25 (2007) 633.
- (2007) J. Vac. Sci. Technol. A , vol.25 , pp. 633
- Neidhardt, J.¹ Hultman, L.²

24
- 4243856801
- S. Souto, M. Pickholz, M. C. dos Santos, and F. Alvarez: Phys. Rev. B 57 (1998) 2536.
- (1998) Phys. Rev. B , vol.57 , pp. 2536
- Souto, S.¹ Pickholz, M.² Dos Santos, M.C.³ Alvarez, F.⁴

25
- 0037811389
- W. J. Gammon, O. Kraft, A. C. Reilly, and B. C. Holloway: Carbon 41 (2003) 1917.
- (2003) Carbon , vol.41 , pp. 1917
- Gammon, W.J.¹ Kraft, O.² Reilly, A.C.³ Holloway, B.C.⁴

26
- 0000425478
- C. Ronning, H. Feldermann, R. Merk, H. Hofsass, P. Reinke, and J. U. Thiele: Phys. Rev. B 58 (1998) 2207.
- (1998) Phys. Rev. B , vol.58 , pp. 2207
- Ronning, C.¹ Feldermann, H.² Merk, R.³ Hofsass, H.⁴ Reinke, P.⁵ Thiele, J.U.⁶

27
- 0000030801
- F. Le Normand, J. Hommet, T. Szorenyi, C. Fuchs, and E. Fogarassy: Phys. Rev. B 64 (2001) 235416.
- (2001) Phys. Rev. B , vol.64 , pp. 235416
- Le Normand, F.¹ Hommet, J.² Szorenyi, T.³ Fuchs, C.⁴ Fogarassy, E.⁵

28
- 0003732720
- Oxford University Press, Oxford, U.K., 5th ed.
- A. F. Wells: Structural Inorganic Chemistry (Oxford University Press, Oxford, U.K., 1984) 5th ed., p. 788.
- (1984) Structural Inorganic Chemistry , pp. 788
- Wells, A.F.¹

29
- 0345201742
- E. D'Anna, M. L. De Giorgi, A. Luches, M. Martino, A. Perrone, and A. Zocco: Thin Solid Films 347 (1999) 72.
- (1999) Thin Solid Films , vol.347 , pp. 72
- D'Anna, E.¹ De Giorgi, M.L.² Luches, A.³ Martino, M.⁴ Perrone, A.⁵ Zocco, A.⁶

30
- 0347593472
- J. Neidhardt, L. Hultman, B. Abendroth, R. Gago, and W. Moller: J. Appl. Phys. 94 (2003) 7059.
- (2003) J. Appl. Phys. , vol.94 , pp. 7059
- Neidhardt, J.¹ Hultman, L.² Abendroth, B.³ Gago, R.⁴ Moller, W.⁵

31
- 0037165927
- J. Robertson: Mater. Sci. Eng. R 37 (2002) 129.
- (2002) Mater. Sci. Eng. R , vol.37 , pp. 129
- Robertson, J.¹

32
- 0006413423
- S. Xu, B. K. Tay, H. S. Tan, L. Zhong, Y. Q. Tu, S. R. P. Silva, and W. I. Milne: J. Appl. Phys. 79 (1996) 7234.
- (1996) J. Appl. Phys. , vol.79 , pp. 7234
- Xu, S.¹ Tay, B.K.² Tan, H.S.³ Zhong, L.⁴ Tu, Y.Q.⁵ Silva, S.R.P.⁶ Milne, W.I.⁷

33
- 0009355065
- S. Xu, D. Flynn, B. K. Tay, S. Prawer, K. W. Nugent, S. R. P. Silva, Y. Lifshitz, and W. I. Milne: Philos. Mag. B 76 (1997) 351.
- (1997) Philos. Mag. B , vol.76 , pp. 351
- Xu, S.¹ Flynn, D.² Tay, B.K.³ Prawer, S.⁴ Nugent, K.W.⁵ Silva, S.R.P.⁶ Lifshitz, Y.⁷ Milne, W.I.⁸

34
- 80054035930
- M. A. Rahman, N. Soin, P. Maguire, R. A. D'Sa, S. S. Roy, C. M. O. Mahony, P. Lemoine, R. McCann, S. K. Mitra, and J. A. D. McLaughlin: Thin Solid Films 520 (2011) 294.
- (2011) Thin Solid Films , vol.520 , pp. 294
- Rahman, M.A.¹ Soin, N.² Maguire, P.³ D'Sa, R.A.⁴ Roy, S.S.⁵ Mahony, C.M.O.⁶ Lemoine, P.⁷ McCann, R.⁸ Mitra, S.K.⁹ McLaughlin, J.A.D.¹⁰

35
- 0033729189
- B. Druz, Y. Yevtukhov, V. Novotny, I. Zaritsky, V. Kanarov, V. Polyakov, and A. Rukavishnikov: Diamond Relat. Mater. 9 (2000) 668.
- (2000) Diamond Relat. Mater. , vol.9 , pp. 668
- Druz, B.¹ Yevtukhov, Y.² Novotny, V.³ Zaritsky, I.⁴ Kanarov, V.⁵ Polyakov, V.⁶ Rukavishnikov, A.⁷

36
- 17644376193
- S. S. Roy, R. McCann, P. Papakonstantinou, P. Maguire, and J. A. McLaughlin: Thin Solid Films 482 (2005) 145.
- (2005) Thin Solid Films , vol.482 , pp. 145
- Roy, S.S.¹ McCann, R.² Papakonstantinou, P.³ Maguire, P.⁴ McLaughlin, J.A.⁵

37
- 0000492782
- B. Kleinsorge, A. C. Ferrari, J. Robertson, and W. I. Milne: J. Appl. Phys. 88 (2000) 1149.
- (2000) J. Appl. Phys. , vol.88 , pp. 1149
- Kleinsorge, B.¹ Ferrari, A.C.² Robertson, J.³ Milne, W.I.⁴

38
- 79551688351
- M. Shakerzadeh, E. H. T. Teo, A. Sorkin, M. Bosman, B. K. Tay, and H. Su: Carbon 49 (2011) 1733.
- (2011) Carbon , vol.49 , pp. 1733
- Shakerzadeh, M.¹ Teo, E.H.T.² Sorkin, A.³ Bosman, M.⁴ Tay, B.K.⁵ Su, H.⁶

39
- 50749132945
- F. Müller and K. Mann: Diamond Relat. Mater. 2 (1993) 233.
- (1993) Diamond Relat. Mater. , vol.2 , pp. 233
- Müller, F.¹ Mann, K.²

40
- 21544432533
- Y. Huai, M. Chaker, J. N. Broughton, E. Gat, H. Pepin, T. Gu, X. Bian, and M. Sutton: Appl. Phys. Lett. 65 (1994) 830.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 830
- Huai, Y.¹ Chaker, M.² Broughton, J.N.³ Gat, E.⁴ Pepin, H.⁵ Gu, T.⁶ Bian, X.⁷ Sutton, M.⁸

41
- 0030212370
- A. A. Voevodin and M. S. Donley: Surf. Coatings Technol. 82 (1996) 199.
- (1996) Surf. Coatings Technol. , vol.82 , pp. 199
- Voevodin, A.A.¹ Donley, M.S.²

42
- 18744413295
- A. A. Voevodin, J. G. Jones, J. S. Zabinski, Z. Czigany, and L. Hultman: J. Appl. Phys. 92 (2002) 4980.
- (2002) J. Appl. Phys. , vol.92 , pp. 4980
- Voevodin, A.A.¹ Jones, J.G.² Zabinski, J.S.³ Czigany, Z.⁴ Hultman, L.⁵

43
- 0037100989
- A. A. Voevodin, J. G. Jones, J. S. Zabinski, and L. Hultman: J. Appl. Phys. 92 (2002) 724.
- (2002) J. Appl. Phys. , vol.92 , pp. 724
- Voevodin, A.A.¹ Jones, J.G.² Zabinski, J.S.³ Hultman, L.⁴

44
- 36449005543
- N. Savvides and T. J. Bell: J. Appl. Phys. 72 (1992) 2791.
- (1992) J. Appl. Phys. , vol.72 , pp. 2791
- Savvides, N.¹ Bell, T.J.²

45
- 21344482790
- H. J. Lee, R. Zubeck, D. Hollars, J. K. Lee, M. Smallen, and A. Chao: J. Vac. Sci. Technol. A 11 (1993) 3007.
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 3007
- Lee, H.J.¹ Zubeck, R.² Hollars, D.³ Lee, J.K.⁴ Smallen, M.⁵ Chao, A.⁶

46
- 21344496600
- D. L. Pappas and J. Hopwood: J. Vac. Sci. Technol. A 12 (1994) 1576.
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1576
- Pappas, D.L.¹ Hopwood, J.²

47
- 0034515134
- Z. Sun, C. H. Lin, Y. L. Lee, J. R. Shi, B. K. Tay, and X. Shi: Thin Solid Films 377-378 (2000) 198.
- (2000) Thin Solid Films , vol.377-378 , pp. 198
- Sun, Z.¹ Lin, C.H.² Lee, Y.L.³ Shi, J.R.⁴ Tay, B.K.⁵ Shi, X.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.