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Volumn 520, Issue 1, 2011, Pages 294-301

Structural and surface energy analysis of nitrogenated ta-C films

Author keywords

Surface energy; Surface roughness; Tetrahedral amorphous carbon (ta C); Thin films; Time of Flight Secondary Ion Mass Spectroscopy; Vacuum arc deposition

Indexed keywords

BULK PROPERTIES; CHEMICAL COMPOSITIONS; DISPERSIVE COMPONENTS; FILTERED CATHODIC VACUUM ARC; GEOMETRIC MEAN; N CONTENT; NITROGENATED TETRAHEDRAL AMORPHOUS CARBON (TA-C:N); PEAK POSITION; PEAK WIDTHS; POLAR COMPONENTS; RAMAN PARAMETERS; SURFACE ENERGIES; SURFACE ENERGY ANALYSIS; TA-C FILM; TETRAHEDRAL AMORPHOUS CARBON (TA-C); TIME-OF-FLIGHT SECONDARY ION MASS SPECTROSCOPY; TOF SIMS; TOTAL SURFACE ENERGY; VACUUM ARC DEPOSITION; XPS SPECTRA;

EID: 80054035930     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.06.031     Document Type: Article
Times cited : (15)

References (39)
  • 1
    • 0027662845 scopus 로고
    • A. Grill Wear 168 1993 143
    • (1993) Wear , vol.168 , pp. 143
    • Grill, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.