Super-hard conductive carbon nano-crystallite films

Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals

Volumn 386, Issue PART 1, 2002, Pages 179-182

  Hirono, Shigeru ^a   Umemura, Shigeru ^b   Tomita, Masato ^a   Kaneko, Reizo ^c  

^a NTT CORPORATION   (Japan)

^b CHIBA INSTITUTE OF TECHNOLOGY   (Japan)

^c WAKAYAMA UNIVERSITY   (Japan)

Author keywords

Conductivity; ECR; Hardness; sp2; sp3; Sputtering

Indexed keywords

CARBON; CHEMICAL BONDS; ELECTRIC CONDUCTIVITY; ELECTRON CYCLOTRON RESONANCE; HARDNESS; SILICON; SPUTTERING; SUBSTRATES; THIN FILMS;

BOND STRUCTURE; CARBON FILMS; PLASMA SPUTTERING; WEAR DEPTH;

NANOSTRUCTURED MATERIALS;

EID: 10944235811     PISSN: 1058725X     EISSN: None     Source Type: Journal    
DOI: 10.1080/10587250290113420     Document Type: Conference Paper

References (2)

1. Umemura, S. et al. (1996). Phil. Mag., 74, 1143.
2. Robertson, J. (1986). Advan. in Phys., 35, 317.