Plasma density induced formation of nanocrystals in physical vapor deposited carbon films

Carbon

Volumn 49, Issue 5, 2011, Pages 1733-1744

  Shakerzadeh, M ^a   Teo, E H T ^b   Sorkin, A ^a   Bosman, M ^c   Tay, B K ^a   Su, H ^d  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^d NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS LAYER; ION ENERGIES; NEGATIVE SUBSTRATES; PHYSICAL VAPOR DEPOSITED; PLASMA PARAMETER; PREFERRED ORIENTATIONS; SUBSTRATE BIAS;

CARBON NANOTUBES; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; IONS; NANOCRYSTALS; PHYSICAL VAPOR DEPOSITION; PLASMA DENSITY; PLASMA DEPOSITION; PLASMA JETS; PLASMAS;

CARBON FILMS;

EID: 79551688351     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2010.12.059     Document Type: Article

References (28)

1. S. Aisenberg, and R. Chabot Ion-beam deposition of thin films of diamondlike carbon J Appl Phys 42 7 1971 2953 2958
2. Y. Lifshitz, S.R. Kasi, J.W. Rabalais, and W. Eckstein Subplantation model for film growth from hyperthermal species Phys Rev B 41 15 1990 10468 10480
3. Y. Lifshitz, G.D. Lempert, and E. Grossman Substantiation of subplantation model for diamondlike film growth by atomic force microscopy Phys Rev Lett 72 17 1994 2753
4. D.R. McKenzie, D. Muller, and B.A. Pailthorpe Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon Phys Rev Lett 67 6 1991 773 776
5. J. Robertson Properties of diamond-like carbon Surf Coat Technol 50 3 1992 185 203
6. M. Chhowalla, J. Robertson, C.W. Chen, S.R.P. Silva, C.A. Davis, and G.A.J. Amaratunga Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films J Appl Phys 81 1 1997 139 145
7. D.G. McCulloch, J.L. Peng, D.R. McKenzie, S.P. Lau, D. Sheeja, and B.K. Tay Mechanisms for the behavior of carbon films during annealing Phys Rev B 70 8 2004 85406-1
8. N.A. Marks, M.F. Cover, and C. Kocer Simulating temperature effects in the growth of tetrahedral amorphous carbon: the importance of infrequent events Appl Phys Lett 89 13 2006 131924-1
9. D.G. McCulloch, N.A. Marks, D.R. McKenzie, and S. Prawer Molecular dynamics and experimental studies of preferred orientation induced by compressive stress Nucl Instrum Meth B 106 1-4 1995 545 549
10. D.R. McKenzie, and M.M.M. Bilek Thermodynamic theory for preferred orientation in carbon and cubic BN J Vac Sci Technol A 16 4 1998 2733 2734
11. D.W.M. Lau, A. Moafi, M.B. Taylor, J.G. Partridge, D.G. McCulloch, and R.C. Powles The structural phases of non-crystalline carbon prepared by physical vapour deposition Carbon 47 14 2009 3263 3270
12. D.W.M. Lau, D.G. McCulloch, M.B. Taylor, J.G. Partridge, D.R. McKenzie, and N.A. Marks Abrupt stress induced transformation in amorphous carbon films with a highly conductive transition phase Phys Rev Lett 100 17 2008 176101-1
13. M. Shakerzadeh, N. Xu, M. Bosman, B.K. Tay, X. Wang, and E.H.T. Teo Field emission enhancement and microstructural changes of carbon films by single pulse laser irradiation Carbon 49 3 2011 1018 1024
14. J.F. Nye Physical properties of crystals: their representation by tensors and matrices 1st ed. 1957 Clarendon Press Oxford
15. D.R. McKenzie Generation and applications of compressive stress induced by low energy ion beam bombardment J Vac Sci Technol B 11 5 1993 1928 1935
16. N.A. Marks Evidence for subpicosecond thermal spikes in the formation of tetrahedral amorphous carbon Phys Rev B 56 5 1997 2441
17. B.K. Tay, Z.W. Zhao, and D.H.C. Chua Review of metal oxide films deposited by filtered cathodic vacuum arc technique Mater Sci Eng R 52 1-3 2006 1 48
18. H.S. Zhang, and K. Komvopoulos Direct-current cathodic vacuum arc system with magnetic-field mechanism for plasma stabilization Rev Sci Instrum 79 7 2008
19. M. Bosman, V.J. Keast, M. Watanabe, D.G. McCulloch, M. Shakerzadeh, and E.H.T. Teo Quantitative, nanoscale mapping of sp2 percentage and crystal orientation in carbon multilayers Carbon 47 1 2009 94 101
20. A.C. Ferrari, A. Libassi, B.K. Tanner, V. Stolojan, J. Yuan, and L.M. Brown Density, sp3 fraction, and cross-sectional structure of amorphous carbon films determined by X-ray reflectivity and electron energy-loss spectroscopy Phys Rev B 62 16 2000 11089 11103
21. T. Frauenheim, F. Welch, T. Kohler, S. Uhlmann, D. Porezag, and G. Seifert Density-functional-based construction of transferable nonorthogonal tight-binding potentials for Si and SiH Phys Rev B 52 15 1995 11492 11501
22. J. Widany, F. Weich, T. Kohler, D. Porezag, and T. Frauenheim Dynamic properties and structure formation of boron and carbon nitrides Diam Relat Mater 5 9 1996 1031 1041
23. S.D. Kenny, A.P. Horsfield, and H. Fujitani Transferable atomic-type orbital basis sets for solids Phys Rev B 62 8 2000 4899 4905
24. W. Humphrey, A. Dalke, and K. Schulten VMD: visual molecular dynamics J Mol Graphics 14 1 1996 33 38
25. F. Seitz, and J.S. Koehler Progress in solid state physics 1st ed. 1957 Academic Press New York
26. 2/SiC interface Appl Phys Lett 93 2 2008 022108-1
27. D.A. Muller, Y. Tzou, R. Raj, and J. Silcox Mapping sp2 and sp3 states of carbon at sub-nanometre spatial resolution Nature 366 6457 1993 725 727
28. H.S. Zhang, and K. Komvopoulos Synthesis of ultrathin carbon films by direct current filtered cathodic vacuum arc J Appl Phys 105 8 2009 083305