Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp3 fraction deposited using a filtered cathodic arc

Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

Volumn 76, Issue 3, 1997, Pages 351-361

  Xu, Shi ^a   Flynn, D ^a   Tay, B K ^a   Prawer, S ^b   Nugent, K W ^b   Silva, S R P ^c   Lifshitz, Y ^d   Milne, W I ^e  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF MELBOURNE   (Australia)

^c UNIVERSITY OF SURREY   (United Kingdom)

^d SOREQ NUCLEAR RESEARCH CENTER   (Israel)

^e UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009355065     PISSN: 13642812     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418639708241099     Document Type: Article

References (20)

1. Argon, A., Gupta, V., Landis, H., and Cornie, J., 1989, Mater. Sci. Engng, A107, 41.
2. Beeman, D., Silverman, J., Lynds, R., and Anderson, M. R., 1984, Phys. Rev. B, 30, 870.
3. Berger, S. D., McKenzie, D. R., and Martin, P. J., 1989, Phil. Mag. Lett., 57, 285.
4. Falabella, S., Boercker, D. B., and Sanders, D. Mi., 1993, Thin Solid Films, 82, 236.
5. Fallon, P. J., Veerasamy, V. S., Davis, C. A., Robertson, J., Amaratunga, G. A. J., Milne, W. I., and Koskinen, J., 1993, Phys. Rev. B, 48, 4777.
6. Geis, M., and Tamor, M. A., 1993, Encyclopedia of Applied Physics (Weinheim: VCH), p. 15.
7. Kulik, J., Lifshitz, Y., Lempert, G. D., Grossman, E., Rabalais, J. W., and Marton, D., 1995, Phys. Rev. B, 52, 15812.
8. Liftshitz, Y., 1996, Diamond Related Mater., 5, 388.
9. Liftshitz, Y., Lempert, G. D., Grossman, E., Avigal, I., Uzan-Saguy, C., Kalish, R., Kulik, J., Marton, D., and Rabalais, J. W., 1994, Diamond Related Mater., 3, 542.
10. Lifshitz, Y., Lempert, G. D., and Rotter, S., 1994, Diamond Related Mater., 3, 542.
11. Lossy, R., Pappas, D. L., Roy, R. A., Doyle, J. P., Cuomo, J. J., and Bruely, J., 1995, J. appl. Phys., 77, 4750.
12. Martin, P. J., Filipczuk, S. W., Netterfield, R. P., Field, J. S., Whitnall, D. F., and McKenzie, D. R., 1988, J. Mater. Sci. Lett., 7, 410.
13. Martin, P. J., Netterfield, R. P., Kinder, T. J., and Descotes, L., 1991, Surf. Coat. Technol., 49, 239.
14. McKenzie, D. R., Muller, D., and Pailthorpe, B. A., 1991, Phys. Rev. Lett., 67, 773.
15. Oliver, W. C., and Pharr, G. M., 1992, J. Mater. Res., 7, 1564.
16. Pharr, G. M., Callahan, D. L., Mcadams, S. D., Tsui, T. Y., Anders, S., Anders, A., Acer, J. W., Brown, I. G., Singh, C., Silva, S. R. P., and Robertson, J., 1996, Phys. Lett., 68, 779.
17. Prawer, S., Nugent, K. W., Liftshitz, Y., Lempert, G. D., Grossman, E., Kulik, J., Avigal, I., and Kalish, R., 1996, Diamond Related Mater., 5, 433.
18. Shi, X., Tay, B. K., Tan, H. S., Li, Z., Tu, Y. Q., Silva, S. R. P., and Milne, W. I., 1996, J. appl. Phys., 79, 7239.
19. Silva, S. R. P., Shi, X., Tay, B. K., Tan, H. S., and Milne, W. I., 1996, Appl. Phys. Lett., 69,491.
20. Silva, S. R. P., Shi, X., Tay, B. K., Tan, H. S., Scheibe, H. L., Chhowalla, M., and Milne, W. I., 1997, Thin Solid Films, 290-291, 317.