Effects on the deposition and mechanical properties of diamond-like carbon film using different inert gases in methane plasma

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 198-202

  Sun, Z ^a   Lin, C H ^a   Lee, Y L ^a   Shi, J R ^a   Tay, B K ^a   Shi, X ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELASTIC MODULI; HARDNESS; HELIUM; METHANE; NEON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRESS ANALYSIS; SUBSTRATES;

DIAMOND-LIKE CARBON (DLC) FILMS;

AMORPHOUS FILMS;

EID: 0034515134     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01427-9     Document Type: Article

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