The structure of amorphous carbon nitride films using a combined study of NEXAFS, XPS and Raman spectroscopies

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 145-150

  Roy, S S ^a   McCann, R ^a   Papakonstantinou, P ^a   Maguire, P ^a   McLaughlin, J A ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

Carbon nitride; Cathodic arc; Thin film; X ray spectroscopy

Indexed keywords

INDENTATION; MAGNETRON SPUTTERING; NITROGEN; RAMAN SPECTROSCOPY; TEMPERATURE DISTRIBUTION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; X RAY SPECTROSCOPY;

BONDING STRUCTURES; CATHODIC ARC; CHEMICAL STATE;

CARBON NITRIDE;

EID: 17644376193     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.132     Document Type: Conference Paper

References (21)

1. J. Robertson Mater. Sci. Eng., R Rep. 37 2002 129
2. T.A. Friedmann, K.F. McCarty, J.C. Barbour, M.P. Siegal, and D.C. Dibble Appl. Phys. Lett. 68 1996 1643
3. J.R. Shi, J.P. Wang, A.T.S. Wee, C.B. Yeo, C.T. Cheng, M. Ueda, S. Tomioka, and J. Ohsako J. Appl. Phys. 92 2002 5966
4. A.C. Ferrari, S.E. Rodil, and J. Robertson Phys. Rev., B 67 2003 155306 (and reference therein)
5. K.W.R. Gilkes, S. Prawer, K.W. Nugent, J. Robertson, H.S. Sands, Y. Lifshitz, and X. Shi J. Appl. Phys. 87 2000 7283
6. S.S. Roy, P. Papakonstantinou, R. McCann, J. McLaughlin, A. Klini, and N. Papadogiannis Appl. Phys., A 79 2004 1009
7. P. Papakonstantinou, and P. Lemoine J. Phys., Condens. Matter 13 2001 2971
8. P. Merel, M. Tabbal, M. Chaker, S. Moisa, and J. Margot Appl. Surf. Sci. 136 1998 105
9. N. Hellgren, J. Guo, C. Sathe, A. Agui, J. Nordgren, Y. Luo, H. Ågren, and J. Sundgren Appl. Phys. Lett. 79 2001 4348
10. D. Das, K.H. Chen, S. Chattopadhyay, and L.C. Chen J. Appl. Phys. 91 2002 4944
11. S. Bhattacharyya, M. Lübbe, and F. Richter J. Appl. Phys. 88 2000 5043
12. I. Shimoyama, G. Wu, T. Sekiguchi, and Y. Baba Phys. Rev., B 62 2000 R6053
13. I. Jimenez, W.M. Wong, D.K. Shuh, B.C. Holloway, M.A. Kelly, P. Pianetta, L.J. Terminello, and F.J. Himpsel Appl. Phys. Lett. 74 1999 2620
14. S. Bhattacharyya, M. Lübbe, P.R. Bressler, D.R.T. Zhan, and F. Richter Diamond Relat. Mater. 11 2002 8
15. M. Mubumbila, B. Bouchet-Fabre, C. Godon, C. Marhic, B. Angleraud, P.Y. Tessier, and T. Minea Diamond Relat. Mater. 13 2004 1433
16. J.M. Ripalda, E. Roman, L. Galan, I. Montero, S. Lizzit, A. Biraldi, G. Comelli, G. Paolucci, and A. Goldoni J. Chem. Phys. 118 2003 3748
17. S.E. Rodil, and S. Muhl Diamond Relat. Mater. 13 2004 1521
18. C. Lenardi, P. Piseri, V. Briois, C.E. Bottani, A.Li. Bassi, and P. Milani J. Appl. Phys. 88 2000 5049
19. X.W. Zhang, N. Ke, W.Y. Cheung, and S.P. Wong Diamond Relat. Mater. 12 2003 1
20. L.K. Cheah, X. Shi, J.R. Shi, E.J. Liu, and S.R.P. Silva J. Non-Cryst. Solids 242 1998 40
21. Y.H. Cheng, B.K. Tay, S.P. Lau, X.L. Qiao, J.G. Chen, Z.H. Sun, and C.S. Xie Appl. Phys., A 75 2002 375