Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis

Journal of Micromechanics and Microengineering

Volumn 22, Issue 4, 2012, Pages

  Penmatsa, Varun ^a   Kawarada, Hiroshi ^b   Wang, Chunlei ^a  

^a Florida International University   (United States)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BYPRODUCTS; NANOIMPRINT LITHOGRAPHY; NANOSTRUCTURES; PHOTORESISTS; PYROLYSIS;

CARBON NANOSTRUCTURES; ELEMENTAL COMPOSITIONS; HIGH-THROUGHPUT SYNTHESIS; INERT ATMOSPHERES; LATERAL DIRECTIONS; PHOTO-NANOIMPRINT; PYROLYZED PHOTORESISTS; VERTICAL SHRINKAGE;

CARBON;

EID: 84865775325     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/4/045024     Document Type: Article

References (44)

1. Xia Y, Yang P, Sun Y, Wu P, Mayers B, Gates B, Yin Y, Kim F and Yan H 2003 One-dimensional nanostructures: synthesis, characterization, and applications Adv. Mater. 15 353-89
2. Arrigan D W M 2004 Nanoelectrodes, nanoelectrode arrays and their applications Analyst 129 1157-65 (Pubitemid 40100987)
3. Ajayan P M and Zhou O T 2001 Applications of carbon nanotubes Top. Appl. Phys. 80 391-425
4. Wang C, Jia G, Taherabadi L and Madou M 2005 A novel method for the fabrication of high-aspect ratio C-MEMS structures IEEE J. Microelectromech. Syst. 14 348-58 (Pubitemid 40679625)
5. Ranganathan S, McCreery R, Majji S M and Madou M 2000 Photoresist-derived carbon for microelectrochemical applications J. Electrochem. Soc. 147 277-82 (Pubitemid 30551918)
6. Singh A, Jayaram J, Madou M and Akbar S 2002 Pyrolysis of negative photoresists to fabricate carbon structures for microelectromechanical systems and electrochemical applications J. Electrochem. Soc. 149 E78-83 (Pubitemid 34325878)
7. Schueller O J A, Brittain S T, Marzolin C and Whitesides G M 1997 Fabrication and characterization of glassy carbon MEMS Chem. Mater. 9 1399-406 (Pubitemid 127471932)
8. Schueller O J A, Brittain S T and Whitesides G M 1997 Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors Adv. Mater. 9 477-80 (Pubitemid 127527636)
9. Lee J A, Hwang S, Kwak J, Park S I, Lee S S and Lee K C 2008 An electrochemical impedance biosensor with aptamer-modified pyrolyzed carbon electrode for label-free protein detection Sensors Actuators B 129 372-79
10. Chen W, Beidaghi M, Penmatsa V, Bechtold K, Kumari L, Li W Z and Wang C 2010 Integration of carbon nanotubes to C-MEMS for on-chip supercapacitors IEEE Trans. Nanotechnol. 9 734-39
11. Wang C, Taherabadi L, Jia G, Madou M, Yeh Y and Dunn B 2004 C-MEMS for the manufacture of 3D microbatteries Electrochem. Solid-State Lett. 7 A435-38
12. Yang J H, Penmatsa V, Tajima S, Kawarada H and Wang C 2009 Direct amination on 3-dimensional pyrolyzed carbon micropattern surface for DNA detection Mater. Lett. 63 2680-83
13. Xu H, Malladi K, Wang C, Kulinsky L, Song M and Madou M 2008 Carbon post-microarrays for glucose sensors Biosens. Bioelectron. 23 1637-44
14. Tang Z R, Malik M R, Shi T L, Lai W and Liu S 2009 Modelling and fabrication of 3-D carbon-MEMS for dielectrophoretic manipulation of micro/nanoparticles in fluids Mater. Sci. Forum 628-29 435-40
15. Penmatsa V, Yang J H, Yu Y and Wang C 2010 Fabrication of porous carbon micropillars using a block copolymer as porogen Carbon 48 4109-15
16. Du R, Ssenyange S, Aktary M and McDermott M T 2009 Fabrication and characterization of graphitic carbon nanostructures with controllable size, shape, and position Small 5 1162-68
17. Lemoine P, Roy S S, Quinn J P, Maguire P D and Mclaughlin J A D 2007 Carbon nanostructures grown with electron and ion beam methods Appl. Phys. A 86 451-56 (Pubitemid 46183624)
18. Chou S Y, Krauss P R and Renstrom P J 1996 Nanoimprint lithography J. Vac. Sci. Technol. B 14 4129-33 (Pubitemid 126582846)
19. Subramani C, Ofir Y, Patra D, Jordan B J, Moran I W, Park M H, Carter K R and Rotello V M 2009 Nanoimprinted polyethyleneimine: a multimodal template for nanoparticle assembly and immobilization Adv. Funct. Mater. 19 2937-42
20. Pisignano D, Persano L, Mele E, Visconti P, Anni M, Gigli G, Cingolani R, Favaretto L and Barbarella G 2005 First-order imprinted organic distributed feedback lasers Synth. Met. 153 237-40 (Pubitemid 41278013)
21. Pisignano D, Persano L, Raganato M F, Visconti P, Cingolani R, Barbarella G, Favaretto L and Gigli G 2004 Room-temperature nanoimprint lithography of non-thermoplastic organic films Adv. Mater 16 525-29
22. Guo L J, Cheng X and Chao C Y 2002 Fabrication of photonic nanostructures in nonlinear optical polymers J. Mod. Opt. 49 663-73 (Pubitemid 34593661)
23. Cheng X, Hong Y T, Kanicki J and Guo L J 2002 High-resolution organic polymer light-emitting pixels fabricated by imprinting technique J. Vac. Sci. Technol. B 20 2877-80 (Pubitemid 36072525)
24. Kao P C, Chu S Y, Chen T Y, Zhan C Y, Hong F C, Chang C Y, Hsu L C, Liao W C and Hon M H 2005 Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography IEEE Trans. Electron Devices 52 1722-26 (Pubitemid 41100633)
25. Cedeno C C et al 2002 J. Nanoimprint lithography for organic electronics Microelectron. Eng. 61-62 25-31 (Pubitemid 34613344)
26. Chou S Y 1997 Patterned magnetic nanostructures and quantized magnetic disks Proc. IEEE 85 652-71 (Pubitemid 127745584)
27. Wu W, Cui B, Sun X Y, Zhang W, Zhuang L, Kong L S and Chou S Y 1998 Large area high density quantized magnetic disks fabricated using nanoimprint lithography J. Vac. Sci. Technol. B 16 3825-29 (Pubitemid 128601025)
28. Martin J I, Nogues J, Liu K, Vicent J L and Schuller I K 2003 Ordered magnetic nanostructures. Fabrication and properties J. Magn. Mater. 256 449-501
29. Glinsner T, Hangweier P, Luesebrink H, Dorsey P, Homola A and Wachenschwanz D 2005 Nanoimprint lithography enables patterned tracks for high-capacity hard disks Solid State Technol. 15 51-4 (Pubitemid 40424288)
30. McClelland G M, Hart M W, Rettner C T, Best M E, Carter K R and Terris B D 2002 Nanoscale patterning of magnetic islands by imprint lithography using a flexible mold Appl. Phys. Lett. 81 1483-85 (Pubitemid 34992939)
31. Cao H, Yu Z N, Wang J, Tegenfeldt J O, Austin R H, Chen E, Wu W and Chou S Y 2002 Fabrication of 10 nm enclosed nanofluidic channels Appl. Phys. Lett. 81 174-76 (Pubitemid 34783740)
32. Guo L J, Cheng X and Chou C F 2004 Fabrication of size-controllable nanofluidic channels by nanoimprinting and its application for DNA stretching Nano Lett. 4 69-73 (Pubitemid 38167866)
33. Hoff J D, Cheng L J, Meyhofer E, Guo L J and Hunt A J 2004 Nanoscale protein patterning by imprint lithography Nano Lett. 4 853-57 (Pubitemid 38716339)
34. Falconnet D, Pasqui D, Park S, Eckert R, Schift H, Gobrecht J, Barbucci R and Textor M 2004 A novel approach to produce protein nanopatterns by combining nanoimprint lithography and molecular self-assembly Nano Lett. 4 1909-14
35. Chou S Y, Krauss P R and Renstrom P J 1995 Imprint of sub-25 nm vias and trenches in polymers Appl. Phys. Lett. 67 3114-17
36. Schueller O J A, Brittain S T and Whitesides G M 1999 Fabrication of glassy carbon microstructures by soft lithography Sensors Actuators A 72 125-39
37. Rodriguezponce D, Lozano K, Eubanks T, Ahmad H, Ferrer D and Lin Y 2010 Thermophysical analysis of SU8-modified microstructures created by visible light lithography J. Polym. Sci. Polym. Phys. B 48 47-54
38. Hammacher J, Fuelle A, Flaemig J, Saupe J, Loechel B and Grimm J 2008 Stress engineering and mechanical properties of SU-8-layers for mechanical applications Microsyst. Technol. 14 1515-23
39. Chun H, Hahm M G, Homma, Meritz Y R, Kuramochi K, Menon L, Ci L, Ajayan P M and Jung Y J 2009 Engineering low- aspect ratio carbon nanostructures: nanocups, nanorings, and nanocontainers ACS Nano 3 1274-79
40. Tuinstra F and Koenig J L 1970 Raman spectrum of graphite J. Chem. Phys. 53 1126-30
41. Chen P and McCreery R L 1996 Control of electron transfer kinetics at glassy carbon electrodes by specific surface modification Anal. Chem. 68 3958-65
42. Fagan D T, Hu I F and Kuwana T 1985 Vacuum heat-treatment for activation of glassy carbon electrodes Anal. Chem. 57 2759-63 (Pubitemid 16475684)
43. Enderling S, Brown C L, Smith S, Dicks M H, Stevenson J T M, Mitkova M, Kozicki M N and Walton A J 2006 Sheet resistance measurement of non-standard cleanroom materials using suspended Greek cross test structures IEEE Trans. Semicond. Manuf. 19 2-9 (Pubitemid 43273364)
44. Park B Y, Yaherabadi L, Wang C, Zoval J and Madou M 2005 Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon-microelectromechanical systems devices in conductive media J. Electrochem. Soc. 152 J136-43 (Pubitemid 43058769)