Modelling and fabrication of 3-D Carbon-MEMS for dielectrophoretic manipulation of micro/nanoparticles in fluids

Materials Science Forum

Volumn 628 629, Issue , 2009, Pages 435-440

  Tang, Z R ^a   Malik, M R ^b   Shi, T L ^b   Gong, J ^b   Nie, L ^b   Liao, G L ^b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

3 D Electrodes; C MEMS; Dielectrophoresis; Manipulation; Micro nanoparticles

Indexed keywords

ASPECT RATIO; CARBON; DIELECTRIC DEVICES; ELECTRIC FIELDS; ELECTROPHORESIS; FABRICATION; FLOORS; MICROELECTRODES; PHOTORESISTS;

3-D ELECTRODES; CONVENTIONAL LITHOGRAPHY; DIELECTROPHORETIC MANIPULATION; ELECTRIC FIELD DISTRIBUTIONS; HIGH THROUGHPUT SYSTEMS; MANIPULATION; MICRO/NANOPARTICLES; THREEDIMENSIONAL (3-D);

C (PROGRAMMING LANGUAGE);

EID: 70449562676     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.628-629.435     Document Type: Conference Paper

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