Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors

Advanced Materials

Volumn 9, Issue 6, 1997, Pages 477-480

  Schueller, Olivier J A ^a   Brittain, Scott T ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE PLASTICS; COPOLYMERS; ELECTRIC CONDUCTIVITY OF SOLIDS; HIGH TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PHENOLIC RESINS; PYROLYSIS; SILICA; SILICON WAFERS; THERMODYNAMIC STABILITY; TRANSFER MOLDING;

FURFURYL ALCOHOL PHENOL; MICROMOLDING IN CAPILLARIES (MIMIC); MICROTRANSFER MOLDING; PHENOL FORMALDEHYDE; POLYDIMETHYLSILOXANE;

CARBON;

EID: 0031140845     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.19970090604     Document Type: Article

References (20)

1. G. M. Jenkins, K. Kawamura, Polymeric Carbons - Carbon Fibre, Glass and Char, Cambridge University Press, Cambridge 1976.
2. K. Kinoshita, Carbon, Electrochemical and Physicochemical Properties, Wiley-Interscience, New York 1988.
3. I. L. Spain, in Chemistry and Physics of Carbon, Vol. 16 (Eds: P. L Walker, Jr., P. A. Thrower), Marcel Dekker, New York, 1981, pp. 119-304.
4. A. M. Lyons, L. P. Hale, C. W. Wilkins Jr., J. Vac. Sci. Technol. B 1985, 3, 447.
5. A. M. Lyons, J. Non-Cryst. Solids 1985, 70, 99.
6. E. Kim, Y. Xia, G. M. Whitesides, Nature 1995, 376, 581.
7. E. Kim, Y. Xia, G. M. Whitesides, J. Am. Chem. Soc. 1996, 118, 5722.
8. Y. Xia, E. Kim, G. M. Whitesides, Chem. Mater. 1996, 8, 1558.
9. X.-M. Zhao, Y. Xia, G. M. Whitesides, Adv. Mater. 1996, 8, 420.
10. A. Kumar, G. M. Whitesides, Appl. Phys. Lett. 1993, 63, 2002.
11. A. Kumar, H. A. Biebuyck, G. M. Whitesides, Langmuir 1994, 10, 1498.
12. The dimensions of the wires were determined by optical microscopy (length of the conducting path) and scanning electron microscopy (cross-section). The cross-section of the wires was approximated to a rectangular cross-section. The thickness of the thin films was determined by profilometry at the edge of a scratch.
13. D. Qin, Y. Xia, G. M. Whitesides, Adv. Mater. 1996, 8, 917.
14. Large features of resin fractured when using substrates such as Si, Ti on Si, Ni on Si, and others. Another advantage of Cr is its high melting point (1857 °C).
15. CRC Handbook of Chemistry and Physics, 66th ed. (Ed: R. C. Weast, M. J. Asstle, W. H. Beyer), CRC Press, Boca Raton, FL 1985.
16. G. Leyendecker, D. Bäuerle, P. Geittner, H. Lydtin, Appl. Phys. Lett. 1981, 39, 921.
17. F. T. Wallenberger, P. C. Nordine, Science 1993, 260, 66.
18. T. M. Bloomstein, D. J. Ehrlich. Appl. Phys. Lett. 1992, 61, 708.
19. O. Lehmann, M. Stuke, Science 1995, 270, 1644.
20. We have also formed carbonaceous replicas of complex surfaces such as binary diffraction gratings, holographic diffraction gratings, and etched Si surfaces with submicron features by casting the polymeric precursor onto the surface of interest.