Nanoimprint lithography for organic electronics

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 25-31

  Cedeño, C Clavijo ^a   Seekamp, J ^a   Kam, A P ^a   Hoffmann, T ^a,e   Zankovych, S ^a   Torres, C M Sotomayor ^a   Menozzi, C ^b   Cavallini, M ^b   Murgia, M ^b   Ruani, G ^b   Biscarini, F ^b   Behl, M ^c   Zentel, R ^c   Ahopelto, J ^d  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b CNR   (Italy)

^c JOHANNES GUTENBERG UNIVERSITY   (Germany)

^d VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^e IMEC   (Belgium)

Author keywords

Nanoimprint lithography; Oligothiophenes; Triaraylamines

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON MICROSCOPY; MICROELECTRODES; NANOTECHNOLOGY; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; SEMICONDUCTING ORGANIC COMPOUNDS; THIN FILMS;

NANOIMPRINT LITHOGRAPHY;

MICROELECTRONICS;

EID: 0036643561     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00505-1     Document Type: Conference Paper

References (15)