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Volumn 48, Issue 1, 2010, Pages 47-54

Thermophysical analysis of SU8-modified microstructures created by visible light lithography

Author keywords

Curing kinetics; Differential scanning calorimetry (DSC); Microstructure; Photoinitiator; Photopolymerization; SU 8; Thermal stability; Thermogravimetric analysis (TGA); UV Vis spectroscopy

Indexed keywords

CONCENTRATION OF; CURING KINETICS; EXPOSURE-TIME; PHOTO-INITIATOR; PHOTOINITIATORS; PROCESSING PARAMETERS; QUANTITATIVE INFORMATION; ROSE BENGAL; THERMAL STABILITY; THERMO-PHYSICAL PROPERTY; THERMOPHYSICAL; ULTIMATE PROPERTIES; UV-VIS SPECTROSCOPY; VISIBLE LASERS; VISIBLE LIGHT;

EID: 73349136597     PISSN: 08876266     EISSN: None     Source Type: Journal    
DOI: 10.1002/polb.21842     Document Type: Article
Times cited : (7)

References (11)
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    • Gelorme, J. D, Cox, R. J, Gutierrez, S. A. R, IBM Co, U.S. Patent 4,882,245, November 21, 1989
    • Gelorme, J. D.; Cox, R. J.; Gutierrez, S. A. R. (IBM Co.). U.S. Patent 4,882,245, November 21, 1989.
  • 3
    • 0034594907 scopus 로고    scopus 로고
    • Campbell, M.; Sharp, D. N.; Harrison, M. T.; Denning, R. G.; Turber- field, A. J. Nature 2000, 404, 53-56.
    • Campbell, M.; Sharp, D. N.; Harrison, M. T.; Denning, R. G.; Turber- field, A. J. Nature 2000, 404, 53-56.
  • 5
    • 17044405971 scopus 로고    scopus 로고
    • Lin, Y.; Herman, P. R.; Darmawikarta, K. Appl Phys Lett 2005, 86, 071117, 1-3.
    • Lin, Y.; Herman, P. R.; Darmawikarta, K. Appl Phys Lett 2005, 86, 071117, 1-3.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.