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Volumn 48, Issue 1, 2010, Pages 47-54
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Thermophysical analysis of SU8-modified microstructures created by visible light lithography
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Author keywords
Curing kinetics; Differential scanning calorimetry (DSC); Microstructure; Photoinitiator; Photopolymerization; SU 8; Thermal stability; Thermogravimetric analysis (TGA); UV Vis spectroscopy
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Indexed keywords
CONCENTRATION OF;
CURING KINETICS;
EXPOSURE-TIME;
PHOTO-INITIATOR;
PHOTOINITIATORS;
PROCESSING PARAMETERS;
QUANTITATIVE INFORMATION;
ROSE BENGAL;
THERMAL STABILITY;
THERMO-PHYSICAL PROPERTY;
THERMOPHYSICAL;
ULTIMATE PROPERTIES;
UV-VIS SPECTROSCOPY;
VISIBLE LASERS;
VISIBLE LIGHT;
CURING;
DIFFERENTIAL SCANNING CALORIMETRY;
MICROSTRUCTURE;
PHOTOPOLYMERIZATION;
PHOTOSENSITIZERS;
RESINS;
THERMODYNAMIC STABILITY;
THERMOGRAVIMETRIC ANALYSIS;
ULTRAVIOLET SPECTROSCOPY;
LITHOGRAPHY;
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EID: 73349136597
PISSN: 08876266
EISSN: None
Source Type: Journal
DOI: 10.1002/polb.21842 Document Type: Article |
Times cited : (7)
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References (11)
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