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Volumn 9, Issue 6, 1997, Pages 1399-1406

Fabrication and Characterization of Glassy Carbon MEMS

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001272348     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm960639v     Document Type: Article
Times cited : (122)

References (37)
  • 5
    • 0000970416 scopus 로고
    • Walker Jr., P. L.; Thrower, P. A., Eds.; Marcel Dekker, Inc.: New York
    • Spain, I. L. In Chemistry and Physics of Carbon; Walker Jr., P. L.; Thrower, P. A., Eds.; Marcel Dekker, Inc.: New York, 1981; Vol. 16, p 119.
    • (1981) Chemistry and Physics of Carbon , vol.16 , pp. 119
    • Spain, I.L.1
  • 18
    • 0000795346 scopus 로고
    • Bard, A. J. Ed.; Marcel Dekker: New York
    • McCreery, R. L. In Bard, A. J. Ed.; Marcel Dekker: New York, 1991; Vol. 17, p 221.
    • (1991) , vol.17 , pp. 221
    • McCreery, R.L.1
  • 21
    • 85033145815 scopus 로고    scopus 로고
    • Guo, S.; Zou, D.; Wang, W. In Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems; San Francisco, CA, 1992; Materials Research Society Symposium Proceedings, Vol. 276, p 233.
    • Materials Research Society Symposium Proceedings , vol.276 , pp. 233
  • 27
    • 85033156823 scopus 로고    scopus 로고
    • Economical mask-making procedures using desktop publishing is also described at by Ash Parameswaran, Simon Fraser University, Burnaby, BC, Canada
    • Economical mask-making procedures using desktop publishing is also described at http://mems.isi.edu/archives/tools/PSMASKMAKER/ by Ash Parameswaran, Simon Fraser University, Burnaby, BC, Canada.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.