C-MEMS for the manufacture of 3D microbatteries

Electrochemical and Solid-State Letters

Volumn 7, Issue 11, 2004, Pages

  Wang, Chunlei ^a   Taherabadi, Lili ^a   Jia, Guangyao ^a   Madou, Marc ^a   Yeh, Yuting ^b   Dunn, Bruce ^b  

^a University of California at Irvine   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ASPECT RATIO; CARBON; ELECTRIC BATTERIES; HIGH TEMPERATURE OPERATIONS; MICROELECTRODES; PHOTORESISTS; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

CARBON-MICROELECTROMECHANICAL SYSTEM (C-MEMS); ENERGY DENSITY; MICROBATTERIES; THREE DIMENSIONAL (3D) ARRAY ELECTRODES;

MICROELECTROMECHANICAL DEVICES;

EID: 10044225823     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1798151     Document Type: Article

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