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Journal of Physics D: Applied Physics
Volumn 45, Issue 29, 2012, Pages
Synthesis and characterization of titanium-containing graphite-like carbon films with low internal stress and superior tribological properties
Author keywords

[No Author keywords available]
Indexed keywords

AMORPHOUS CARBON MATRIX; CARBIDE PARTICLES; CHARACTERIZATION TECHNIQUES; FILM MICROSTRUCTURES; FILM STRUCTURE; FRICTION COEFFICIENTS; GRAPHITE-LIKE STRUCTURES; HIGH HARDNESS; ROOT MEAN SQUARE ROUGHNESS; ROUGH SURFACES; SILICON SUBSTRATES; TRANSFER FILM; TRIBOLOGICAL PROPERTIES; UNBALANCED MAGNETRON SPUTTERING SYSTEMS; WEAR RATES;
EID: 84863516641     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/29/295301     Document Type: Article
Times cited : (46)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.