Structure of diamondlike carbon films deposited by femtosecond and nanosecond pulsed laser ablation

Journal of Applied Physics

Volumn 108, Issue 11, 2010, Pages

  Sikora, A ^a,b   Garrelie, F ^a   Donnet, C ^a   Loir, A S ^a   Fontaine, J ^c   Sanchez Lopez, J C ^d   Rojas, T C ^d  

^a UNIVERSITÉ JEAN MONNET   (France)

^b LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^c UNIVERSITÉ DE LYON   (France)

^d INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; CHAINS; DIAMOND LIKE CARBON FILMS; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; ENERGY DISSIPATION; FEMTOSECOND LASERS; KINETIC ENERGY; KINETICS; LASER ABLATION; MECHANICAL PROPERTIES; NANOSTRUCTURES; PULSED LASER DEPOSITION; PULSED LASERS; THERMAL PLUMES;

CARBON-BASED NANOSTRUCTURES; DEPOSITION MECHANISM; FILM CHARACTERISTICS; IONIZATION THRESHOLDS; KINETIC ENERGY DISTRIBUTIONS; NANOSECOND PULSED LASER; RAMAN INVESTIGATIONS; STRUCTURAL DISORDERS;

CARBON FILMS;

EID: 78751560556     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3510483     Document Type: Article

References (39)

1. J. Robertson, Mater. Sci. Eng. R 37, 129 (2002). 10.1016/S0927-796X(02) 00005-0 0927-796X
2. Y. Lifshitz, S. R. Kasi, and J. W. Rabelais, Phys. Rev. Lett. 0031-9007 62, 1290 (1989). 10.1103/PhysRevLett.62.1290
3. C. Donnet and A. Erdemir, in Tribology of Diamond-Like Carbon Films, edited by, C. Donnet, and, A. Erdemir, (Springer, New York, 2008), pp. 1-9. 10.1007/978-0-387-49891-1
4. A. A. Voevodin and J. S. Zabinski, in Amorphous Carbon: State of the Art, edited by, S. R. P. Silva, J. Robertson, W. I. Milne, and, G. A. Amaratunga, (World Scientific, Singapore, 1998), p. 237.
5. C. L. Marquardt, R. T. Williams, and D. J. Nagel, in Plasma Synthesis and Etching of Electronic Materials, R. P. H. Chang, and, B. Abeles, eds. (Materials Research Society, Pittsburgh, 1985), Vol. 38, p. 325.
6. D. L. Pappas, K. L. Saenger, J. Cuomo, and R. W. Dreyfus, J. Appl. Phys. 0021-8979 72, 3966 (1992). 10.1063/1.352249
7. M. P. Siegal, J. C. Barbour, P. N. Provencio, D. R. Tallant, and T. A. Friedmann, Appl. Phys. Lett. 0003-6951 73, 759 (1998). 10.1063/1.121992 (Pubitemid 128673907)
8. D. Schneider, C. F. Meyer, H. Mai, B. Shoneich, H. Ziegle, H. J. Sheibe, and Y. Lifshitz, Diamond Relat. Mater. 0925-9635 7, 973 (1998). 10.1016/S0925-9635(97)00337-3
9. G. Reisse, B. Keiper, S. Weissmantel, and U. Falke, Appl. Surf. Sci. 0169-4332 127-129, 500 (1998). 10.1016/S0169-4332(97)00682-X
10. S. J. P. Laube and A. A. Voevodin, Surf. Coat. Technol. 0257-8972 99, 14 (1998). 10.1016/S0257-8972(97)00109-6
11. M. Bonelli, A. C. Ferrari, A. Fioravanti, A. Li Bassi, A. Miotello, and P. M. Ossi, Eur. Phys. J. B 1434-6028 25, 269 (2002).
12. J. C. Orlianges, C. Champeaux, A. Catherinot, T. Merle, and B. Angleraud, Thin Solid Films 0040-6090 453-454, 285 (2004). 10.1016/j.tsf.2003.11.285
13. P. S. Banks, L. Dinh, B. C. Stuart, M. D. Feit, A. M. Komashko, A. M. Rubenchik, M. D. Perry, and W. McLean, Appl. Phys. A: Mater. Sci. Process. 0947-8396 69, S347 (1999). 10.1007/s003390051415
14. F. Qian, V. Craciun, R. K. Singh, S. D. Dutta, and P. P. Pronko, J. Appl. Phys. 0021-8979 86, 2281 (1999). 10.1063/1.371043
15. F. Garrelie, A. S. Loir, C. Donnet, F. Rogemond, R. Le Harzic, M. Belin, E. Audouard, and P. Laporte, Surf. Coat. Technol. 0257-8972 163-164, 306 (2003). 10.1016/S0257-8972(02)00481-4 (Pubitemid 36122288)
16. M. D. Shirk and P. A. Molian, Carbon 0008-6223 39, 1183 (2001). 10.1016/S0008-6223(00)00236-0 (Pubitemid 32431989)
17. T. Katsuno, C. Godet, J. C. Orlianges, A. S. Loir, F. Garrelie, and C. Catherinot, Appl. Phys. A: Mater. Sci. Process. 0947-8396 81, 471 (2005). 10.1007/s00339-005-3257-6 (Pubitemid 40940552)
18. A. Sikora, O. Bourgeois, J. C. Sanchez-Lopez, J. -N. Rouzaud, T. C. Rojas, A. -S. Loir, J. -L. Garden, F. Garrelie, and C. Donnet, Thin Solid Films 0040-6090 518, 1470 (2009). 10.1016/j.tsf.2009.09.111
19. A. C. Ferrari and J. Robertson, Phys. Rev. B 0556-2805 64, 075414 (2001). 10.1103/PhysRevB.64.075414
20. V. I. Merkulov, J. S. Lannin, C. H. Munro, S. A. Asher, V. S. Veerasamy, and W. I. Milne, Phys. Rev. Lett. 0031-9007 78, 4869 (1997). 10.1103/PhysRevLett.78.4869
21. G. Adamopoulos, K. W. R. Gilkes, J. Robertson, N. M. J. Conway, B. Y. Kleinsorg, A. Buckley, and D. N. Batchelder, Diamond Relat. Mater. 0925-9635 8, 541 (1999). 10.1016/S0925-9635(98)00430-0
22. K. W. R. Gilkes, S. Prawer, K. W. Nugent, J. Robertson, H. S. Sands, Y. Lifshitz, and X. Shi, J. Appl. Phys. 0021-8979 87, 7283 (2000). 10.1063/1.372981
23. S. M. Huang, Z. Sun, Y. F. Lu, and M. H. Hong, Appl. Phys. A: Mater. Sci. Process. 0947-8396 74, 519 (2002). 10.1007/s003390101044 (Pubitemid 34268664)
24. J. Joly-Pottuz, C. Matta, M. I. de Barros Bouchet, B. Vacher, J. M. Martin, and T. Sagawa, J. Appl. Phys. 0021-8979 102, 064912 (2007). 10.1063/1.2779256 (Pubitemid 47509007)
25. S. Xu, D. Flynn, B. K. Tay, S. Prawer, K. W. Nugent, S. R. P. Silva, Y. Lifshitz, and W. I. Milne, Philos. Mag. B 1364-2812 76, 351 (1997). 10.1080/01418639708241099
26. J. L. Loubet, M. Bauer, A. Tonck, S. Bec, and B. Gauthier-Manuel, in Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructures, edited by, M. Nastasi, (Kluwer-Academic, Netherlands, 1993), pp. 429-447.
27. S. Bec, A. Tonck, and J. -L. Loubet, in Thin Films: Stresses and Mechanical Properties V, S. P. Baker, C. A. Ross, P. H. Townsend, C. A. Volkert, and, P. Børgesen, eds. (Materials Research Society, Pittsburgh, 1995), Vol. 356, p. 657.
28. J. C. Sánchez-López, A. Erdemir, C. Donnet, and T. C. Rojas, Surf. Coat. Technol. 0257-8972 163-164, 444 (2003). 10.1016/S0257- 8972(02)00641-2 (Pubitemid 36128753)
29. S. Waidmann, M. Knupfer, J. Fink, B. Kleinsorge, and J. Robertson, J. Appl. Phys. 0021-8979 89, 3783 (2001). 10.1063/1.1350999
30. S. Liang, A. Yajima, S. Abe, Y. Mera, and K. Maeda, Surf. Sci. 0039-6028 593, 161 (2005). 10.1016/j.susc.2005.06.088 (Pubitemid 41427550)
31. V. Serin, E. Beche, R. Berjoan, O. Abidate, D. Rats, J. Fontaine, L. Vandelbucke, C. Germain, and A. Catherinot, Proceedings of the Fifth International Symposium on Diamond Materials, edited by, J. L. Davidson, W. D. Brown, A. Gicquel, B. V. Spytsin, and, J. C. Angus, (The Electrochem. Soc, Pennington, NJ, 1998), pp. 126-141.
32. A. C. Ferrari, in Tribology of Diamond-Like Carbon Films, edited by, C. Donnet, and, A. Erdemir, (Springer, New York, 2008), pp. 25-82. 10.1007/978-0-387-49891-1-2
33. C. Casiraghi, A. C. Ferrari, and J. Robertson, Phys. Rev. B 0556-2805 72, 085401 (2005). 10.1103/PhysRevB.72.085401 (Pubitemid 41509235)
34. S. Xu, B. K. Tay, H. S. Tan, L. Zhong, Y. Q. Tu, S. R. P. Silva, and W. I. Milne, J. Appl. Phys. 0021-8979 79, 7234 (1996). 10.1063/1.361440
35. 3 C content in both films.
36. A. C. Ferrari and J. Robertson, Phys. Rev. B 0556-2805 61, 14095 (2000). 10.1103/PhysRevB.61.14095
37. F. Tuinstra and J. L. Koenig, J. Chem. Phys. 0021-9606 53, 1126 (1970). 10.1063/1.1674108
38. G. P. Lopinski, V. I. Merkulov, and J. S. Lannin, Appl. Phys. Lett. 0003-6951 69, 3348 (1996). 10.1063/1.117302
39. M. Guillermin, C. Liebig, F. Garrelie, R. Stoian, A. -S. Loir, and E. Audouard, Appl. Surf. Sci. 0169-4332 255, 5163 (2009). 10.1016/j.apsusc.2008.07. 207