Effect of composition on mechanical behaviour of diamond-like carbon coatings modified with titanium

Thin Solid Films

Volumn 519, Issue 10, 2011, Pages 3061-3067

  Caschera, D ^a   Federici, F ^a   Pandolfi, L ^a   Kaciulis, S ^a   Sebastiani, M ^b   Bemporad, E ^b   Padeletti, G ^a  

^a CNR   (Italy)

^b ROMA TRE UNIVERSITY   (Italy)

Author keywords

Composites; Diamond like carbon; Hard coatings; Nanoindentation; Plasma enhanced chemical vapor deposition; Titanium isopropoxide; X ray diffraction; X ray photoelectron spectroscopy

Indexed keywords

AMORPHOUS TITANIUM OXIDE; ATOMIC CONCENTRATION; CHEMICAL COMPOSITIONS; COMPOSITES; CRYSTALLINITIES; DEPOSITION PARAMETERS; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON COATINGS; DLC FILM; GAS ATMOSPHERE; GRAIN SIZE; HARDNESS-TO-MODULUS RATIO; INTRINSIC HARDNESS; MATRIX; MECHANICAL BEHAVIOUR; NANOCRYSTALLINES; NANOINDENTATION TECHNIQUES; PLASMA DECOMPOSITION; PROCESS PARAMETERS; PROPERTIES OF COMPOSITES; SUBSTRATE TEMPERATURE; TITANIUM ISOPROPOXIDE;

AMORPHOUS FILMS; CARBON FILMS; COMPOSITE FILMS; DIAMONDS; DIFFRACTION; ELECTRONS; HARD COATINGS; HARDNESS; MECHANICAL PROPERTIES; NANOCOMPOSITE FILMS; NANOINDENTATION; ORGANOMETALLICS; OXIDE FILMS; PHOTOELECTRICITY; PHOTONS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TITANIUM; TITANIUM CARBIDE; TITANIUM OXIDES; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

DIAMOND LIKE CARBON FILMS;

EID: 79952312741     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.12.031     Document Type: Article

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