Superior tribological properties of an amorphous carbon film with a graphite-like structure

Chinese Physics B

Volumn 21, Issue 1, 2012, Pages

  Wang, Yong Jun ^a,b   Li, Hong Xuan ^a   Ji, Li ^a   Liu, Xiao Hong ^a   Wu, Yan Xia ^a,b   Zhou, Hui Di ^a   Chen, Jian Min ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

graphite like carbon film; magnetron sputtering; microstructure; performance

Indexed keywords

ATOMIC FORCE MICROSCOPES; DEPOSITED FILMS; DEPOSITION CONDITIONS; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; FILM CHARACTERISTICS; FILM STRUCTURE; GRAPHITE-LIKE STRUCTURES; HIGH HARDNESS; HIGH LOAD CAPACITY; HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPES; HUMID ATMOSPHERES; INTERNAL STRESS; PERFORMANCE; RAMAN SPECTROMETERS; SUBSTRATE BIAS VOLTAGES; TRIBOLOGICAL PROPERTIES; TRIBOMETERS; UNBALANCED MAGNETRON SPUTTERING;

AMORPHOUS CARBON; AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; GRAPHITE; HARDNESS; MAGNETRON SPUTTERING; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; WEAR RESISTANCE;

CARBON FILMS;

EID: 84863012199     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/21/1/016101     Document Type: Article

References (24)

1. Neuville S and Matthews A 2007 Thin Solid Films 515 6619
2. Field S K, Jarratt M and Teer D G 2004 Tribol. Int. 37 949
3. Zeng X T, Zhang S, Ding X Z and Teer D G 2002 Surf. Coat. Technol. 420-421 366
4. Fu Y H, Zhu X D, He J W and Yang S C 2003 Tribology 23 463 (in Chinese)
5. Yan S P, Jiang B L, Su Y and Zhang Y H 2008 Tribology 28 491 (in Chinese)
6. Wang Y J, Li H X, Ji L, Zhao F, Liu X H, Kong Q H, Wang Y X, Quan W L, Zhou H D and Chen J M 2010 J. Phys. D: Appl. Phys. 43 505401
7. Zhao F, Li H X, Ji L, Mo Y F, Quan W L, Zhou H D and Chen J M 2009 J. Phys. D: Appl. Phys. 42 165407
8. Wang J, Liu G C, Wang L D, Deng X L and Xu J 2008 Chin. Phys. B 17 3108
9. Li H X, Xu T, Chen J M, Zhou H D and Liu H W 2005 Acta Phys. Sin. 54 1885 (in Chinese)
10. Peng X L, Barber Z H and Clyne T W 2001 Surf. Coat. Technol. 138 23
11. Lifshitz Y, Edrei R, Hoffman A, Grossman E, Lempert G D, Berthold J, Schultrich B and Jäger H U 2007 Diamond Relat. Mater. 16 1771
12. Konca E, Cheng Y T, Weiner A M, Dasch J M and Alpas A T 2006 Surf. Coat. Technol. 200 3996
13. Ferrari A C and Robertson J 2000 Phys. Rev. B 61 14095
14. Ferrari A C and Robertson J 2001 Phys. Rev. B 64 075414
15. Zhang Z Y, Lu X C, Luo J B, Shao T M, Qing T and Zhang C H 2006 Chin. Phys. 15 2697
16. Marcinauskas L, Valinius V and Grigonis A 2011 Surf. Coat. Technol. 205 S71
17. Robertson J 2002 Mater. Sci. Eng. R 37 129
18. Amaratunga G A J, Chhowalla M, Kiely C J, Alexandrou I, Aharonov R and Devenish R M 1996 Nature 383 321
19. Baptista D L and Zawislak F C 2004 Diamond Relat. Mater. 13 1791
20. Voevodin A A, Donley M S, Zabinski J S and Bultman J E 1995 Surf. Coat. Technol. 76-77 534
21. Liao J X, Liu W M, Xu T and Xue Q J 2004 Carbon 42 387
22. Zhao F, Li H X, Ji L, Wang Y J, Zhou H D and Chen J M 2010 Diamond Relat. Mater. 19 342
23. Neuville S 2002 Diamond Relat. Mater. 11 1721
24. Li R L, Tu J P, Hong C F, Liu D G, Zhou D H and Sun H L 2009 J. Appl. Phys. 106 123508